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Characterization and Modeling of an Acoustic Sensor Using AlN Thin-Film for Frequency Selectivity
- Characterization and Modeling of an Acoustic Sensor Using AlN Thin-Film for Frequency Selectivity
- Kim, S[Kim, Sangwon]; Song, WJ[Song, Won Joon]; Tang, J[Tang, Jongmoon]; Jang, JH[Jang, Jeong Hun]; Choi, H[Choi, Hongsoo]
- DGIST Authors
- Kim, S[Kim, Sangwon]; Tang, J[Tang, Jongmoon]; Choi, H[Choi, Hongsoo]
- Issue Date
- Electronic Materials Letters, 10(1), 299-303
- Article Type
- Acoustic Devices; Acoustic Sensor; Acoustic Sensors; AlN; Bandpass Filters; Electromechanical Devices; FEM; Finite-Element Method; Finite Element Analysis Model; Frequency Response; Frequency Selectivity; MEMS; Natural Frequencies; One-Dimensional Beam; Piezoelectric; Resonance Frequencies; Scanning Laser-Doppler Vibrometers
- In this study, a one-dimensional beam array acoustic sensor was built using microelectromechanical system technology to achieve mechanical frequency selectivity. The acoustic sensor contained 16 beams of various lengths. The frequency selectivity was evaluated with a scanning laser Doppler vibrometer, while applying an alternating current having various frequencies with 2 volts amplitude and 0 volt offset. The beams formed separate band-pass filters in the proximity of the corresponding resonance frequencies in the range of 3 kHz to 13 kHz. The first resonance frequencies of the beams were calculated using finite element analysis to simulate the frequency response. In the finite element analysis models, mode shapes were studied to understand the effect of the beam deformation caused by the residual stress generated during the MEMS fabrication. The measured and simulated first resonance frequencies of the beams provided solid evidence of the tonotopicity of the sensor. © 2014 The Korean Institute of Metals and Materials and Springer Science+Business Media Dordrecht.
- Korean Institute of Metals and Materials
- Related Researcher
Choi, Hong Soo
Bio-Micro Robotics Lab
Micro/Nano robot; Neural prostheses; MEMS; BMI; MEMS/NEMS; BioMEMS; MEMS 초음파 트랜스듀스; 인공와우
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- Robotics EngineeringETC1. Journal Articles
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