Cited 4 time in webofscience Cited 6 time in scopus

Characterization and Modeling of an Acoustic Sensor Using AlN Thin-Film for Frequency Selectivity

Title
Characterization and Modeling of an Acoustic Sensor Using AlN Thin-Film for Frequency Selectivity
Authors
Kim, S[Kim, Sangwon]Song, WJ[Song, Won Joon]Tang, J[Tang, Jongmoon]Jang, JH[Jang, Jeong Hun]Choi, H[Choi, Hongsoo]
DGIST Authors
Kim, S[Kim, Sangwon]; Tang, J[Tang, Jongmoon]; Choi, H[Choi, Hongsoo]
Issue Date
2014-01
Citation
Electronic Materials Letters, 10(1), 299-303
Type
Article
Article Type
Article
Keywords
Acoustic DevicesAcoustic SensorAcoustic SensorsAlNBandpass FiltersElectromechanical DevicesFEMFinite-Element MethodFinite Element Analysis ModelFrequency ResponseFrequency SelectivityMEMSNatural FrequenciesOne-Dimensional BeamPiezoelectricResonance FrequenciesScanning Laser-Doppler Vibrometers
ISSN
1738-8090
Abstract
In this study, a one-dimensional beam array acoustic sensor was built using microelectromechanical system technology to achieve mechanical frequency selectivity. The acoustic sensor contained 16 beams of various lengths. The frequency selectivity was evaluated with a scanning laser Doppler vibrometer, while applying an alternating current having various frequencies with 2 volts amplitude and 0 volt offset. The beams formed separate band-pass filters in the proximity of the corresponding resonance frequencies in the range of 3 kHz to 13 kHz. The first resonance frequencies of the beams were calculated using finite element analysis to simulate the frequency response. In the finite element analysis models, mode shapes were studied to understand the effect of the beam deformation caused by the residual stress generated during the MEMS fabrication. The measured and simulated first resonance frequencies of the beams provided solid evidence of the tonotopicity of the sensor. © 2014 The Korean Institute of Metals and Materials and Springer Science+Business Media Dordrecht.
URI
http://hdl.handle.net/20.500.11750/1591
DOI
10.1007/s13391-013-3048-8
Publisher
Korean Institute of Metals and Materials
Related Researcher
  • Author Choi, Hong Soo Bio-Micro Robotics Lab
  • Research Interests Micro/Nano robot; Neural prostheses; MEMS; BMI; MEMS/NEMS; BioMEMS; MEMS 초음파 트랜스듀스; 인공와우
Files:
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Collection:
Robotics EngineeringETC1. Journal Articles


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