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Piezoelectric Performance of Continuous Beam and Narrow Supported Beam Arrays for Artificial Basilar Membranes

Title
Piezoelectric Performance of Continuous Beam and Narrow Supported Beam Arrays for Artificial Basilar Membranes
Authors
Song, WJ[Song, Won Joon]Jang, J[Jang, Jongmoon]Kim, S[Kim, Sangwon]Choi, H[Choi, Hongsoo]
DGIST Authors
Jang, J[Jang, Jongmoon]; Kim, S[Kim, Sangwon]; Choi, H[Choi, Hongsoo]
Issue Date
2014-09
Citation
Electronic Materials Letters, 10(5), 1011-1018
Type
Article
Article Type
Article
Keywords
Artificial Basilar MembraneBasilar MembranesContinuous BeamsDeep Reactive Ion EtchingMEMSPiezoelectric BeamPiezoelectric Beam ArrayResonance FrequenciesResonance FrequencySupported Beams
ISSN
1738-8090
Abstract
We report an experimental assessment of the electrical performance of two piezoelectric beam arrays for artificial basilar membranes (ABMs): a continuous beam array (CBA) and a narrow-supports beam array (NSBA). Both arrays consist of piezoelectric beams of sequentially varying lengths that mimic the frequency selectivity of mammalian cochleae. The narrow supports of the NSBA resulted in lateral deformation of the beams, whereas the CBA beams were flat. The displacement and piezoelectric output of each beam were measured at the resonance frequency of each beam using a scanning laser-Doppler vibrometer (SLDV). Both ABM prototypes showed mechanical frequency selectivity that depended on the beam length. The CBA generated a piezoelectric output in the range 6.6–23.2 μV and exhibited electrical frequency separability, whereas the NSBA failed to generate sufficient electrical potential due to the lateral deformation of the piezoelectric beams. The CBA was found to be more effective as an ABM, with potential for use in cochlear implants. © 2014, The Korean Institute of Metals and Materials and Springer Science+Business Media Dordrecht.
URI
http://hdl.handle.net/20.500.11750/1677
DOI
10.1007/s13391-014-4053-2
Publisher
Korean Institute of Metals and Materials
Related Researcher
  • Author Choi, Hong Soo Bio-Micro Robotics Lab
  • Research Interests Micro/Nano robot; Neural prostheses; MEMS; BMI; MEMS/NEMS; BioMEMS; MEMS 초음파 트랜스듀스; 인공와우
Files:
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Collection:
Robotics EngineeringETC1. Journal Articles


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