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Flexible piezoelectric nanogenerators based on a transferred ZnO nanorod/Si micro-pillar array

Title
Flexible piezoelectric nanogenerators based on a transferred ZnO nanorod/Si micro-pillar array
Authors
Baek, S.-H.[Baek, Seong Ho]Park, I.-K.[Park, Il Kyu]
DGIST Authors
Baek, S.-H.[Baek, Seong Ho]
Issue Date
2017
Citation
Nanotechnology, 28(9)
Type
Article
Article Type
Article
Keywords
Beneficial EffectsCapacitanceCapacitance MeasurementElectrical Power SourcesFlexibleHeterojunctionsHigher Output VoltagesHydrothermal GrowthNanogeneratorNanorodsNanotechnologyPiezoelectricitySiliconSiliconesTouch SensorTouch SensorsWearable SensorsZinc OxideZnO NanorodZnO Nanorods
ISSN
0957-4484
Abstract
Flexible piezoelectric nanogenerators (PNGs) based on a composite of ZnO nanorods (NRs) and an array of Si micro-pillars (MPs) are demonstrated by a transfer process. The flexible composite structure was fabricated by hydrothermal growth of ZnO NRs on an electrochemically etched Si MP array with various lengths followed by mechanically delaminating the Si MP arrays from the Si substrate after embedding them in a polydimethylsiloxane matrix. Because the Si MP arrays act as a supporter to connect the ZnO NRs electrically and mechanically, verified by capacitance measurement, the output voltage from the flexible PNGs increased systematically with the increased density ZnO NRs depending on the length of the Si MPs. The flexible PNGs showed 3.2 times higher output voltage with a small change in current with increasing Si MP length from 5 to 20 μm. The enhancement of the output voltage is due to the increased number of series-connected ZnO NRs and the beneficial effect of a ZnO NR/Si MP heterojunction on reducing free charge screening effects. The flexible PNGs can be attached on fingers as a wearable electrical power source or motion sensor. © 2017 IOP Publishing Ltd.
URI
http://hdl.handle.net/20.500.11750/2096
DOI
10.1088/1361-6528/aa58ee
Publisher
Institute of Physics Publishing
Files:
There are no files associated with this item.
Collection:
Smart Textile Convergence Research Group1. Journal Articles


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