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Fabrication and Characterization of Hybrid Si/ZnO Subwavelength Structures as Efficient Antireflection Layer

Title
Fabrication and Characterization of Hybrid Si/ZnO Subwavelength Structures as Efficient Antireflection Layer
Authors
Baek, SH[Baek, Seong-Ho]Park, JS[Park, Jung-Soo]Jung, YI[Jung, Yong-Il]Park, IK[Park, Il-Kyu]Kim, JH[Kim, Jae Hyun]
DGIST Authors
Baek, SH[Baek, Seong-Ho]; Park, JS[Park, Jung-Soo]; Kim, JH[Kim, Jae Hyun]
Issue Date
2013-09
Citation
Journal of Nanoscience and Nanotechnology, 13(9), 6359-6361
Type
Article
Article Type
Article
Keywords
Anti-Reflection CoatingAnti-Reflection CoatingsAnti-Reflection LayersAnti-Reflective PropertiesBroad-Band SpectrumColloid ChemistryFabricationFabrication And CharacterizationsHybrid StructureHydrothermal SynthesisInfrared DevicesLight ReflectionNanorodsReflectionScanning Electron MicroscopySiliconSilicon WireSilicon WiresSub-Wavelength StructuresThree DimensionalZinc OxideZnO NanorodZnO Nanorods
ISSN
1533-4880
Abstract
In this study, we fabricated and characterized three dimensional (3D) silicon (Si)/zinc oxide (ZnO) hybrid subwavelength structures to investigate their antireflective properties. Si nanorods (SiNRs) were fabricated by electrochemical etching, and subsequentially we grew ZnO NRs on SiNR as templates by using hydrothermal synthesis. The morphological and optical properties of hybrid Si/ZnO subwavelength structures were investigated by scanning electron microscopy (SEM) and ultra violet-visible-near infrared (UV-VIS-NIR) spectrophotometer, respectively. The reflectance on SiNRs is greatly reduced comparing with that on the conventional textured Si surface. Moreover, the hybrid SiNR/ZnO NR structures gave the lowest reflectance (<3%) throughout the broadband spectrum range. We suggest that the combination of SiNRs and ZnO NRs trap light, leading to suppressing light reflection and increasing light scattering to the hybrid structures. © 2013 American Scientific Publishers.
URI
http://hdl.handle.net/20.500.11750/3208
DOI
10.1166/jnn.2013.7725
Publisher
American Scientific Publishers
Files:
There are no files associated with this item.
Collection:
Division of Nano∙Energy Convergence Research1. Journal Articles


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