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Characteristics ofMoSe(2) formation during rapid thermal processing ofMo-coated glass

Title
Characteristics ofMoSe(2) formation during rapid thermal processing ofMo-coated glass
Authors
Lee, S[Lee, Soobin]Koo, J[Koo, Jaseok]Kim, S[Kim, Sammi]Kim, SH[Kim, Soo-Hyun]Cheon, T[Cheon, Taehoon]Oh, JS[Oh, Jong Seok]Kim, SJ[Kim, Suk Jin]Kim, WK[Kim, Woo Kyoung]
DGIST Authors
Cheon, T[Cheon, Taehoon]
Issue Date
2013-05-15
Citation
Thin Solid Films, 535, 206-213
Type
Article
Article Type
Article; Proceedings Paper
Keywords
Cu(In, Ga)Se2Electron DiffractionEnergy Dispersive X Ray SpectroscopyGlassHigh-Temperature X-Ray DiffractionHigh Temperature X-Ray DiffractionMoSe2Random OrientationsRapid Thermal AnnealingRapid Thermal Processing (RTP)Reaction PathwaysScanning Electron MicroscopySelected Area Electron Diffraction PatternSputtering SystemsSuperconducting FilmsThermal-AnnealingTransmission Electron MicroscopyVaporsX Ray Diffraction AnalysisX Ray Spectroscopy
ISSN
0040-6090
Abstract
Multi-layered Mo, prepared using an in-line sputtering system, was selenized by reaction with Se vapor and thermal annealing of bilayer Mo/Se samples. In situ high-temperature X-ray diffraction analysis indicated that the phase evolution of the glass/Mo/Se sample during heat treatment was similar to that of the selenization of glass/Mo with Se vapor, except for crystallization of Se in the glass/Mo/Se sample. However, the MoSe2 layer formed from the selenization of the Mo layer by Se vapor preferentially grew perpendicularly to the Mo surface, whereas MoSe2 formed from the reaction of Mo with Se liquid showed random orientation. The detailed reaction pathways of the double-layer random-MoSe2/vertical-MoSe2 formation from the Mo/Se bilayer sample were suggested on the basis of the several characterization results including X-ray diffraction, scanning electron microscopy, high-resolution transmission electron microscopy, energy dispersive X-ray spectroscopy and selected-area electron diffraction patterns. © 2012 Elsevier B.V.
URI
http://hdl.handle.net/20.500.11750/3238
DOI
10.1016/j.tsf.2012.10.035
Publisher
Elsevier
Files:
There are no files associated with this item.
Collection:
Center for Core Research Facilities1. Journal Articles


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