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dc.contributor.author Jang, Hwan Soo -
dc.contributor.author Choi, Ho-Jin -
dc.contributor.author Kim, Jae Hyun -
dc.date.available 2017-07-11T06:56:07Z -
dc.date.created 2017-04-10 -
dc.date.issued 2012-04 -
dc.identifier.citation Journal of Nanoscience and Nanotechnology, v.12, no.4, pp.3567 - 3570 -
dc.identifier.issn 1533-4880 -
dc.identifier.uri http://hdl.handle.net/20.500.11750/3375 -
dc.description.abstract We report on the fabrication of silicon nanostructures with a high aspect ratio that were created using a combination of electrochemical etching and alkaline etching. With this technique, we were able to fabricate nano- and/or micro-wire structures that are perfectly periodic over large areas of 3.14 cm 2. After porous silicon was created by electrochemical etching, the effect of post-alkaline etching was investigated to determine how changes in the etching time, solution concentration and temperature of the etchant influenced the silicon morphology. As a result, periodic silicon wire arrays with good vertical alignment were obtained, and these arrays had a width of less than 500 nm and/or a high aspect ratio of more than 20. © 2012 American Scientific Publishers. -
dc.language English -
dc.publisher American Scientific Publishers -
dc.title Fabrication of p-Type Silicon Nanowire Arrays with a High Aspect Ratio Using Electrochemical and Alkaline Etching -
dc.type Article -
dc.identifier.doi 10.1166/jnn.2012.5591 -
dc.identifier.wosid 000305850900121 -
dc.identifier.scopusid 2-s2.0-84863299960 -
dc.type.local Article(Overseas) -
dc.type.rims ART -
dc.description.journalClass 1 -
dc.citation.publicationname Journal of Nanoscience and Nanotechnology -
dc.contributor.nonIdAuthor Jang, Hwan Soo -
dc.contributor.nonIdAuthor Choi, Ho-Jin -
dc.identifier.citationVolume 12 -
dc.identifier.citationNumber 4 -
dc.identifier.citationStartPage 3567 -
dc.identifier.citationEndPage 3570 -
dc.identifier.citationTitle Journal of Nanoscience and Nanotechnology -
dc.type.journalArticle Article; Proceedings Paper -
dc.description.isOpenAccess N -
dc.subject.keywordAuthor Electrochemical Etching -
dc.subject.keywordAuthor KOH Etching -
dc.subject.keywordAuthor Nanowire -
dc.subject.keywordAuthor p-Type silicon -
dc.subject.keywordPlus SI WIRE ARRAYS -
dc.contributor.affiliatedAuthor Jang, Hwan Soo -
dc.contributor.affiliatedAuthor Choi, Ho-Jin -
dc.contributor.affiliatedAuthor Kim, Jae Hyun -
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