Field emission characteristics of an oxidized porous polysilicon field emitter using the electrochemical oxidation process
- Title
- Field emission characteristics of an oxidized porous polysilicon field emitter using the electrochemical oxidation process
- Author(s)
- Kwon, Soon-Il ; You, Sung-Won ; Shon, Young-Soo ; Cho, Yong-Soo ; Park, Byung-Nam ; Choi, Sie-Young
- DGIST Authors
- Kwon, Soon-Il ; You, Sung-Won ; Shon, Young-Soo ; Cho, Yong-Soo ; Park, Byung-Nam ; Choi, Sie-Young
- Issued Date
- 2006-09
- Type
- Article
- Article Type
- Article
- Author Keywords
- electrochemical oxidation (ECO) ; field emission ; porous polysilicon ; O-2 annealing
- ISSN
- 0026-2692
- Abstract
- The field emission characteristics of an oxidized porous polysilicon (OPPS) were investigated with Pt/Ti multilayer electrode using the electrochemical oxidation (ECO) process. A Pt/Ti multilayer electrode, using ECO, showed highly efficient and stable electron emission characteristics; moreover, it can be applied to large area of a glass substrate with a low temperature process. Electron emission characteristics were improved with O2 annealing at 600 °C after the ECO process. It was found that forming a high quality oxide layer from the ECO-formed SiO2 was crucial in improving electron emission characteristics. The Pt/Ti OPPS field emitter, which was annealed at 600 °C for 5 h, showed an efficiency of 3.81% at Vps = 14 V . © 2006 Elsevier Ltd. All rights reserved.
- Publisher
- Mackintosh Publications
- Files in This Item:
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- Appears in Collections:
- ETC 1. Journal Articles
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