Cited 2 time in webofscience Cited 3 time in scopus

Field emission characteristics of an oxidized porous polysilicon field emitter using the electrochemical oxidation process

Title
Field emission characteristics of an oxidized porous polysilicon field emitter using the electrochemical oxidation process
Authors
Kwon, SI[Kwon, Soon-Il]You, SW[You, Sung-Won]Sohn, YS[Sohn, Young-Soo]Cho, YS[Cho, Yong-Soo]Park, BN[Park, Byung-Nam]Choi, SY[Choi, Sie-Young]
DGIST Authors
Sohn, YS[Sohn, Young-Soo]
Issue Date
2006-09
Citation
Microelectronics Journal, 37(9), 993-996
Type
Article
Article Type
Article
Keywords
AnnealingElectrochemical Oxidation (ECO)ElectrochemistryElectrodesElectron EmissionField EmissionMulti-Layer ElectrodeO2 AnnealingOxidationOxidized Porous Polysilicon (OPPS)PolysiliconPorous MaterialsPorous PolysiliconSilica
ISSN
0026-2692
Abstract
The field emission characteristics of an oxidized porous polysilicon (OPPS) were investigated with Pt/Ti multilayer electrode using the electrochemical oxidation (ECO) process. A Pt/Ti multilayer electrode, using ECO, showed highly efficient and stable electron emission characteristics; moreover, it can be applied to large area of a glass substrate with a low temperature process. Electron emission characteristics were improved with O2 annealing at 600 °C after the ECO process. It was found that forming a high quality oxide layer from the ECO-formed SiO2 was crucial in improving electron emission characteristics. The Pt/Ti OPPS field emitter, which was annealed at 600 °C for 5 h, showed an efficiency of 3.81% at Vps = 14 V . © 2006 Elsevier Ltd. All rights reserved.
URI
http://hdl.handle.net/20.500.11750/3598
DOI
10.1016/j.mejo.2006.02.001
Publisher
Elsevier Ltd
Files:
There are no files associated with this item.
Collection:
School of Undergraduate Studies1. Journal Articles


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