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Integration of Ag/AgCl reference electrode with MOSFET-type biosensor

Title
Integration of Ag/AgCl reference electrode with MOSFET-type biosensor
Authors
Choi, Ho-JinShin, Jang-KyooChoi, PyungLyu, Hong-KunSawada, KazuakiIshida, Makoto
DGIST Authors
Lyu, Hong-Kun
Issue Date
2007
Citation
s20th International Microprocesses and Nanotechnology Conference, MNC 2007, 352-353
Type
Conference
Article Type
Conference Paper
ISBN
4990247248
Abstract
A CMOS process-compatible MOSFET-type biosensor and a built-in Ag/AgCl thin film reference electrode which is able to replace the conventional voluminous Ag/AgCl glass electrode have been fabricated on the same chip. Au was used as the gate metal of the MOSFET-type biosensor in order to immobilize biomolecules. Electrical characteristics of the MOSFET-type biosensor with the built-in Ag/AgCl thin film reference electrode is quite stable and similar to the characteristics of the biosensor with the conventional Ag/AgCl glass electrode. Therefore, it is concluded that the Ag/AgCl thin film reference electrode might replace the voluminous Ag/AgCl glass reference electrode for realization of miniature biosensors and micro total analysis systems.
URI
http://hdl.handle.net/20.500.11750/4003
DOI
10.1109/IMNC.2007.4456249
Publisher
Institute of Electrical and Electronics Engineers Inc.
Related Researcher
Files:
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Collection:
Intelligent Devices and Systems Research Group2. Conference Papers


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