Cited 0 time in webofscience Cited 0 time in scopus

MEMS flexible artificial basilar membrane fabricated from piezoelectric aluminum nitride on an SU-8 substrate

Title
MEMS flexible artificial basilar membrane fabricated from piezoelectric aluminum nitride on an SU-8 substrate
Authors
Jang, JongmoonJang, Jeong HunChoi, Hongsoo
DGIST Authors
Jang, Jongmoon; Choi, Hongsoo
Issue Date
2017-07
Citation
Journal of Micromechanics and Microengineering, 27(7)
Type
Article
Article Type
Article
Keywords
Acoustic SensorAln Thin FilmsAluminumAluminum Nitride (AlN)Aluminum Nitride (AlN)Artificial Basilar Membrane (ABM)Artificial Basilar Membrane (ABM)Basilar MembranesBeam ArraysCochleaFrequency SelectivityFrequency SelectivityFrequency SelectivityMechanical DisplacementsMEMSModelNitridesOrientationPiezoelectric AlN TransducerPiezoelectric CoefficientPiezoelectricityResonance FrequenciesScanning Electron Microscopy (SEM)Scanning Laser Doppler VibrometersSU 8SystemX Ray Diffraction
ISSN
0960-1317
Abstract
In this paper, we present a flexible artificial basilar membrane (FABM) that mimics the passive mechanical frequency selectivity of the basilar membrane. The FABM is composed of a cantilever array made of piezoelectric aluminum nitride (AlN) on an SU-8 substrate. We analyzed the orientations of the AlN crystals using scanning electron microscopy and X-ray diffraction. The AIN crystals are oriented in the c-axis (0 0 2) plane and effective piezoelectric coefficient was measured as 3.52 pm V-1. To characterize the frequency selectivity of the FABM, mechanical displacements were measured using a scanning laser Doppler vibrometer. When electrical and acoustic stimuli were applied, the measured resonance frequencies were in the ranges of 663.0-2369 Hz and 659.4-2375 Hz, respectively. These results demonstrate that the mechanical frequency selectivity of this piezoelectric FABM is close to the human communication frequency range (300-3000 Hz), which is a vital feature of potential auditory prostheses. © 2017 IOP Publishing Ltd.
URI
http://hdl.handle.net/20.500.11750/4138
DOI
10.1088/1361-6439/aa7236
Publisher
Institute of Physics Publishing
Related Researcher
  • Author Choi, Hong Soo Bio-Micro Robotics Lab
  • Research Interests Micro/Nano robot; Neural prostheses; MEMS; BMI; MEMS/NEMS; BioMEMS; MEMS 초음파 트랜스듀스; 인공와우
Files:
There are no files associated with this item.
Collection:
Robotics EngineeringETC1. Journal Articles


qrcode mendeley

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE