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MEMS flexible artificial basilar membrane fabricated from piezoelectric aluminum nitride on an SU-8 substrate
- MEMS flexible artificial basilar membrane fabricated from piezoelectric aluminum nitride on an SU-8 substrate
- Jang, Jongmoon; Jang, Jeong Hun; Choi, Hongsoo
- DGIST Authors
- Jang, Jongmoon; Choi, Hongsoo
- Issue Date
- Journal of Micromechanics and Microengineering, 27(7)
- Article Type
- Acoustic Sensor; Aln Thin Films; Aluminum; Aluminum Nitride (AlN); Aluminum Nitride (AlN); Artificial Basilar Membrane (ABM); Artificial Basilar Membrane (ABM); Basilar Membranes; Beam Arrays; Cochlea; Frequency Selectivity; Frequency Selectivity; Frequency Selectivity; Mechanical Displacements; MEMS; Model; Nitrides; Orientation; Piezoelectric AlN Transducer; Piezoelectric Coefficient; Piezoelectricity; Resonance Frequencies; Scanning Electron Microscopy (SEM); Scanning Laser Doppler Vibrometers; SU 8; System; X Ray Diffraction
- In this paper, we present a flexible artificial basilar membrane (FABM) that mimics the passive mechanical frequency selectivity of the basilar membrane. The FABM is composed of a cantilever array made of piezoelectric aluminum nitride (AlN) on an SU-8 substrate. We analyzed the orientations of the AlN crystals using scanning electron microscopy and X-ray diffraction. The AIN crystals are oriented in the c-axis (0 0 2) plane and effective piezoelectric coefficient was measured as 3.52 pm V-1. To characterize the frequency selectivity of the FABM, mechanical displacements were measured using a scanning laser Doppler vibrometer. When electrical and acoustic stimuli were applied, the measured resonance frequencies were in the ranges of 663.0-2369 Hz and 659.4-2375 Hz, respectively. These results demonstrate that the mechanical frequency selectivity of this piezoelectric FABM is close to the human communication frequency range (300-3000 Hz), which is a vital feature of potential auditory prostheses. © 2017 IOP Publishing Ltd.
- Institute of Physics Publishing
- Related Researcher
Choi, Hong Soo
Bio-Micro Robotics Lab
Micro/Nano robot; Neural prostheses; MEMS; BMI; MEMS/NEMS; BioMEMS; MEMS 초음파 트랜스듀스; 인공와우
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- Department of Robotics EngineeringBio-Micro Robotics Lab1. Journal Articles
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