Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Jang, Jongmoon | - |
dc.contributor.author | Jang, Jeong Hun | - |
dc.contributor.author | Choi, Hongsoo | - |
dc.date.available | 2017-08-10T08:10:25Z | - |
dc.date.created | 2017-08-09 | - |
dc.date.issued | 2017-07 | - |
dc.identifier.issn | 0960-1317 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11750/4138 | - |
dc.description.abstract | In this paper, we present a flexible artificial basilar membrane (FABM) that mimics the passive mechanical frequency selectivity of the basilar membrane. The FABM is composed of a cantilever array made of piezoelectric aluminum nitride (AlN) on an SU-8 substrate. We analyzed the orientations of the AlN crystals using scanning electron microscopy and X-ray diffraction. The AIN crystals are oriented in the c-axis (0 0 2) plane and effective piezoelectric coefficient was measured as 3.52 pm V-1. To characterize the frequency selectivity of the FABM, mechanical displacements were measured using a scanning laser Doppler vibrometer. When electrical and acoustic stimuli were applied, the measured resonance frequencies were in the ranges of 663.0-2369 Hz and 659.4-2375 Hz, respectively. These results demonstrate that the mechanical frequency selectivity of this piezoelectric FABM is close to the human communication frequency range (300-3000 Hz), which is a vital feature of potential auditory prostheses. © 2017 IOP Publishing Ltd. | - |
dc.publisher | Institute of Physics Publishing | - |
dc.title | MEMS flexible artificial basilar membrane fabricated from piezoelectric aluminum nitride on an SU-8 substrate | - |
dc.type | Article | - |
dc.identifier.doi | 10.1088/1361-6439/aa7236 | - |
dc.identifier.scopusid | 2-s2.0-85021307749 | - |
dc.identifier.bibliographicCitation | Journal of Micromechanics and Microengineering, v.27, no.7 | - |
dc.description.isOpenAccess | FALSE | - |
dc.subject.keywordAuthor | MEMS | - |
dc.subject.keywordAuthor | piezoelectric AlN transducer | - |
dc.subject.keywordAuthor | frequency selectivity | - |
dc.subject.keywordAuthor | SU-8 | - |
dc.subject.keywordAuthor | artificial basilar membrane (ABM) | - |
dc.subject.keywordPlus | Acoustic Sensor | - |
dc.subject.keywordPlus | Aln Thin Films | - |
dc.subject.keywordPlus | Aluminum | - |
dc.subject.keywordPlus | Aluminum Nitride (AlN) | - |
dc.subject.keywordPlus | Artificial Basilar Membrane (ABM) | - |
dc.subject.keywordPlus | Basilar Membranes | - |
dc.subject.keywordPlus | Beam Arrays | - |
dc.subject.keywordPlus | Cochlea | - |
dc.subject.keywordPlus | Frequency Selectivity | - |
dc.subject.keywordPlus | Mechanical Displacements | - |
dc.subject.keywordPlus | MEMS | - |
dc.subject.keywordPlus | Model | - |
dc.subject.keywordPlus | Nitrides | - |
dc.subject.keywordPlus | Orientation | - |
dc.subject.keywordPlus | Piezoelectric AlN Transducer | - |
dc.subject.keywordPlus | Piezoelectric Coefficient | - |
dc.subject.keywordPlus | Piezoelectricity | - |
dc.subject.keywordPlus | Resonance Frequencies | - |
dc.subject.keywordPlus | Scanning Electron Microscopy (SEM) | - |
dc.subject.keywordPlus | Scanning Laser Doppler Vibrometers | - |
dc.subject.keywordPlus | SU 8 | - |
dc.subject.keywordPlus | System | - |
dc.subject.keywordPlus | X Ray Diffraction | - |
dc.citation.number | 7 | - |
dc.citation.title | Journal of Micromechanics and Microengineering | - |
dc.citation.volume | 27 | - |
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