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31-mode piezoelectric micromachined ultrasonic transducer with PZT thick film by granule spraying in vacuum process

Title
31-mode piezoelectric micromachined ultrasonic transducer with PZT thick film by granule spraying in vacuum process
Authors
Jung, J[Jung, Joontaek]Annapureddy, V[Annapureddy, Venkateswarlu]Hwang, GT[Hwang, Geon-Tae]Song, Y[Song, Youngsup]Lee, W[Lee, Wonjun]Kang, W[Kang, Woojin]Ryu, J[Ryu, Jungho]Choi, H[Choi, Hongsoo]
DGIST Authors
Jung, J[Jung, Joontaek]; Lee, W[Lee, Wonjun]; Choi, H[Choi, Hongsoo]
Issue Date
2017-05-22
Citation
Applied Physics Letters, 110(21)
Type
Article
Article Type
Article
Keywords
Aerosol DepositionDeposition RatesDiagnosisFabricationacoustic ImpedanceGranulationHigh Deposition RatesImpedance Matching (Acoustic)Intravascular UltrasoundLeadLow Power ConsumptionMedical Diagnosis SystemMEMSMicro Machined Ultrasonic TransducerPerformancePiezoelectric LayersPiezoelectric Micromachined Ultrasonic Transducer (PMUT)Piezoelectric TransducersPiezoelectricityPMUT ArraysSilicon on Insulator TechnologySilicon on Insulator WafersSilicon WafersTemperatureThick FilmsTransducersUltrasonic Transducers
ISSN
0003-6951
Abstract
A piezoelectric micromachined ultrasonic transducer (pMUT) is an ideal device for portable medical diagnosis systems, intravascular ultrasound systems, and ultrasonic cameras because of its favorable characteristics including small size, acoustic impedance matching with the body, low power consumption, and simple integration with the systems. Despite these advantages, practical applications are limited because of insufficient acoustic pressure of the pMUT caused by the thin active piezoelectric layer. Here, we report the fabrication of a thick piezoelectric Pb(Zr,Ti)O3 (PZT) film-based pMUT device having high deflection at low driving voltage using the granule spraying in vacuum (GSV) process. Pre-patterned high-density thick (exceeding 8 μm) PZT films were grown on 6-inch-diameter Si/SiO2/Ti/Pt silicon-on-insulator wafers at room temperature at a high deposition rate of ∼5 μm min-1. The fabrication process using the proposed GSV process was simple and fast, and the deflection of the pMUT exhibited a high value of 0.8 μm. © 2017 Author(s).
URI
http://hdl.handle.net/20.500.11750/4172
DOI
10.1063/1.4983833
Publisher
American Institute of Physics Inc.
Files:
There are no files associated with this item.
Collection:
Robotics EngineeringBio-Micro Robotics Lab1. Journal Articles


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