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Piezoelectric/magnetostrictive MEMS resonant sensor array for in-plane multi-axis magnetic field detection

Title
Piezoelectric/magnetostrictive MEMS resonant sensor array for in-plane multi-axis magnetic field detection
Authors
Kim, Hoe JoonWang, SiboXu, ChangtingLaughlin, DavidZhu, JingxiPiazza, Gianluca
DGIST Authors
Kim, Hoe Joon
Issue Date
2017
Citation
30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, 109-112
Type
Conference
Article Type
Conference Paper
ISBN
9781510000000
ISSN
1084-6999
Abstract
This paper reports the demonstration of an array of piezoelectric/magnetostrictive micro electromechanical system (MEMS) magnetic resonant sensors (PM-MRS) for multi-axis magnetic field (H-field) detection. An array of 43 MHz aluminum nitride (AlN) piezoelectric resonators vibrating along different in-plane directions (θ) but coated with a magnetostrictive layer (Fe65.6Co9.4B25) with the same easy axis (EZ) exhibit unique mechanical/electrical responses as a function of the applied H-field and its direction, enabling a high resolution multi-axis H-field detection. The sensor design yields resonators with a high quality factor (Q ∼ 1500) and electromechanical coupling coefficient (kt 2 ∼ 2%) - the highest value ever reported for an AlN PM-MRS. This sensor system paves the way for low power magnetometers that enables single-chip multi-axis H-field detection. © 2017 IEEE.
URI
http://hdl.handle.net/20.500.11750/4326
DOI
10.1109/MEMSYS.2017.7863352
Publisher
Institute of Electrical and Electronics Engineers Inc.
Related Researcher
  • Author Kim, Hoe Joon Nano Materials and Devices Lab
  • Research Interests MEMS/NEMS; Micro/Nano Sensors; Piezoelectric Devices; Nanomaterials; Heat Transfer; Atomic Force Microscope
Files:
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Collection:
Robotics EngineeringNano Materials and Devices Lab2. Conference Papers


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