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High-Performance Monolithic 3D CMOS Enabled by Orientation-Aligned Seedless Laser Crystallization and Ultra-Shallow Laser Activation

2025-06-11T15:00:00Z

Title: High-Performance Monolithic 3D CMOS Enabled by Orientation-Aligned Seedless Laser Crystallization and Ultra-Shallow Laser Activation Author(s): Park, Jongyoun; Jeong, Heejae; Park, Euyjin; Park, Geuntae; Ahn, Chunghyun; Lee, Sangsu; Kwon, Hyuk-Jun; Yu, Hyun-Yong Abstract: In this study, we demonstrate PSLC Si-based CMOS devices on the M3D top layer using a seedless crystallization process. Laser crystallization forms single-orientation Si channels (25 μ m grain size), enhancing carrier mobility. Laser S/D activation achieves low contact resistivity (∼ 10-8 Ω· cm2) below 400 °C, meeting M3D constraints. PSLC-Si CMOS devices exhibit ION/IOFF > 108 with high μFE,e(521 cm2/V· s) and μFE,h (163 cm2/V· s). CMOS inverters show clear switching transitions, confirming feasibility for M3D logic applications. These results validate the potential of a fully laser-based process for M3D-integrated logic devices. Keyword: Monolithic 3D (M3D), Patterned Seedless Laser-Crystallization (PSLC), Si, Laser activation, Mobility © 2025 Elsevier B.V., All rights reserved.

Next Generation Electronics with Pulsed Laser Processing

2017-09-14T15:00:00Z

Title: Next Generation Electronics with Pulsed Laser Processing Author(s): Kwon, Hyuk Jun

Flexible/Wearable Electronics with 2D Materials and Pulsed Laser Processing

2017-11-15T15:00:00Z

Title: Flexible/Wearable Electronics with 2D Materials and Pulsed Laser Processing Author(s): Kwon, Hyuk Jun

Conceptual design of mniniature tunable stiffness display using MR fluids

2009-06-22T15:00:00Z

Title: Conceptual design of mniniature tunable stiffness display using MR fluids Author(s): Yang, Tae Heon; Kwon, Hyuk-Jun; Lee, Seung Sup; An, Jinung; Koo, Jeong Hoi; Kim, Sang Youn; Kwon, Dong Soo Abstract: Stiffness information is one of the important factors to naturally and intuitively interact with electronic devices and displays. For small-sized electronics, such as hand-held devices, the size of haptic modules is a key limiting factor, and it must be minimized. This paper proposes a concept of miniature and tunable stiffness display an aim to design a miniature device conveying stiffness information. The proposed device is based on Magneto-Rheological(MR) fluids, and its stiffness can be varied by activating the MR fluids with the magnetic field produced by the solenoid, . The proposed stiffness display is composed of three main parts such as an elastic returning part (providing elastic force), a stiffness tuning part (generating resistive force), and a PDMS membrane reservoir part (serving as a repository for the MR fluids). The use of MR fluids in the haptic display allows us to miniature it by eliminating bulky electrical and mechanical components in conventional haptic devices. ©2009 IEEE.