Repository Collection: null https://scholar.dgist.ac.kr/handle/20.500.11750/1930 Tue, 10 Mar 2026 22:31:48 GMT 2026-03-10T22:31:48Z 반도체 제조공정에서 발생하는 입자 측정을 위한 입자 저감 시스템 및 그 측정 방법(PARTICLE ABATEMENT SYSTEM FOR PARTICLE MEASUREMENT FROM SEMICONDUCTOR MANUFACTURING PROCESS AND MEASUREMENT METHOD THEREFOR) https://scholar.dgist.ac.kr/handle/20.500.11750/59316 Title: 반도체 제조공정에서 발생하는 입자 측정을 위한 입자 저감 시스템 및 그 측정 방법(PARTICLE ABATEMENT SYSTEM FOR PARTICLE MEASUREMENT FROM SEMICONDUCTOR MANUFACTURING PROCESS AND MEASUREMENT METHOD THEREFOR) Author(s): 김회준; 장일류 Abstract: 본 발명은 반도체 제조공정에서 발생하는 입자 측정을 위한 입자 저감 시스템이 개시된다. 본 발명의 하나의 실시 예에 따른 반도체 제조공정에서 발생하는 입자 측정을 위한 입자 저감 시스템은 반도체 장비의 배기라인에 결합되는 배관부; 상기 배관부의 일부에 형성되어 있는 센서 삽입부에 삽입되며 오염입자를 감지하기 위한 압전 공진 센서가 구비되어 있는 센서 플레이트; 및 상기 센서 삽입부와 이격되어 형성되어 있는 상기 배관부의 오리피스 결합부에 결합되는 오리피스; 를 포함한다. https://scholar.dgist.ac.kr/handle/20.500.11750/59316 WARMTH MEASUREMENT DEVICE, WARMTH MEASUREMENT SYSTEM, AND WARMTH MEASUREMENT METHOD THEREBY https://scholar.dgist.ac.kr/handle/20.500.11750/58734 Title: WARMTH MEASUREMENT DEVICE, WARMTH MEASUREMENT SYSTEM, AND WARMTH MEASUREMENT METHOD THEREBY Author(s): 최유빈; 김회준; 김항겸 Abstract: A warmth measurement device according to an embodiment of the present invention includes: a pyroelectric element unit that generates electricity when there is a temperature gradient therein; and a temperature control unit that is connected to one side of the pyroelectric element unit and provides hot air or cold air to the pyroelectric element unit to maintain the pyroelectric element unit at a set temperature different from room temperature. https://scholar.dgist.ac.kr/handle/20.500.11750/58734 MATERIAL MEASUREMENT DEVICE, MATERIAL MEASUREMENT SYSTEM, AND MATERIAL MEASUREMENT METHOD https://scholar.dgist.ac.kr/handle/20.500.11750/58717 Title: MATERIAL MEASUREMENT DEVICE, MATERIAL MEASUREMENT SYSTEM, AND MATERIAL MEASUREMENT METHOD Author(s): 장일류; 정순인; 김회준 Abstract: The present invention relates to a surface acoustic wave-based material measurement device, a material measurement system, and a material measurement method, and relates to a technology capable of, by generating multiple resonant waves, accurately and reliably measuring various unique properties of a temperature and frequency dependent material. https://scholar.dgist.ac.kr/handle/20.500.11750/58717 STRAIN MEASURING SENSOR AND MANUFACTURING METHOD THEREFOR https://scholar.dgist.ac.kr/handle/20.500.11750/58714 Title: STRAIN MEASURING SENSOR AND MANUFACTURING METHOD THEREFOR Author(s): 김회준; 류채현 Abstract: A strain measuring sensor according to the present invention may comprise: a substrate layer formed of a flexible material; and a conductive thin-film layer provided on a surface of the substrate layer and having at least any one pattern with irregular straight lines or irregular curves. https://scholar.dgist.ac.kr/handle/20.500.11750/58714