Cited 0 time in
Cited 1 time in
The Impact of Bottom Electrode Coverage Rate on Electromechanical Coupling and Quality Factor of AlN MEMS Contour Mode Resonators
- The Impact of Bottom Electrode Coverage Rate on Electromechanical Coupling and Quality Factor of AlN MEMS Contour Mode Resonators
- Jung, Soon In; Piazza, Gianluca; Kim, Hoe Joon
- DGIST Authors
- Kim, Hoe Joon
- Issue Date
- 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 917-920
- This paper reports the impact of bottom electrode design on electromechanical coupling (k 2t) and quality factor (Q) of laterally vibrating aluminum nitride (AlN) contour-mode resonators (CMRs). AlN-CMRs with various bottom electrode coverage rates ranging from 33% to 120% are fabricated at two different center frequencies of 220 MHz and 1 GHz. We have measured a total of 160 devices and the results show that bottom electrode coverage rate clearly affects both and Q, inducing shifts as much as 230% and 890%, respectively. The changes in aforementioned properties are different for the tested center frequencies. It has shown that the bottom coverage rate determines the active (or vibrating) region of the resonator, and thus directly impacting Q. In contrast, kt2 increases with the bottom coverage rate, regardless to the center frequency of the resonator. Our findings indicate that a careful selection of the bottom electrode design could optimize or even improve both kt2 and Q, which ultimately determines the power budget and noise level of AlN MEMS resonators. © 2019 IEEE.
- Institute of Electrical and Electronics Engineers Inc.
- Related Researcher
Kim, Hoe Joon
Nano Materials and Devices Lab
MEMS/NEMS; Micro/Nano Sensors; Piezoelectric Devices; Nanomaterials; Heat Transfer; Atomic Force Microscope
There are no files associated with this item.
- Department of Robotics EngineeringNano Materials and Devices Lab2. Conference Papers
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.