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- Jang, Jae Eun ;
- Kwon, Hyuk-Jun
- 2023-11
- Baik, Seunghun. (2023-11). Reducing Specific Contact Resistivity for n-type Germanium using Laser Activation Process and Nano-island Formation. Applied Surface Science, 638. doi: 10.1016/j.apsusc.2023.157967
- Elsevier BV
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- Jang, Jae Eun ;
- Kwon, Hyuk-Jun
- 2024-05
- Baik, Seunghun. (2024-05). Heavily phosphorus doped germanium with local strain compensation effect by Co-implantation and rapid thermal process. Journal of Alloys and Compounds, 984. doi: 10.1016/j.jallcom.2024.173952
- Elsevier
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- GE 2
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- Phosphorus 2
- SHALLOW JUNCTION FORMATION 2
- ACTIVATION 1
- Co-implantation 1
- DIFFUSION 1
- DOPING PROCESS 1
- EXTRACTION 1
