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MEMS-based piezoelectric acoustic transducers using lead-free sputtered (K0.5,Na0.5)NbO3 thin films for implantable devices

Title
MEMS-based piezoelectric acoustic transducers using lead-free sputtered (K0.5,Na0.5)NbO3 thin films for implantable devices
Authors
Choi, Hongsoo
DGIST Authors
Choi, Hongsoo
Issue Date
2019-11-08
Citation
International Conference on Advanced Electromaterials
Type
Conference
URI
http://hdl.handle.net/20.500.11750/14167
Publisher
The Korean Institute of Electrical and Electronic Material Engineers
Related Researcher
  • Author Choi, Hongsoo Bio-Micro Robotics Lab
  • Research Interests Micro/Nano robot; Neural prostheses; MEMS; BMI; MEMS/NEMS; BioMEMS; MEMS 초음파 트랜스듀스; 인공와우
Files:
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Collection:
Department of Robotics and Mechatronics EngineeringBio-Micro Robotics Lab2. Conference Papers


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