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MEMS-based piezoelectric acoustic transducers using lead-free sputtered (K0.5,Na0.5)NbO3 thin films for implantable devices

Title
MEMS-based piezoelectric acoustic transducers using lead-free sputtered (K0.5,Na0.5)NbO3 thin films for implantable devices
Author(s)
Choi, Hongsoo
DGIST Authors
Choi, Hongsoo
Issued Date
2019-11-08
Type
Conference
URI
http://hdl.handle.net/20.500.11750/14167
Publisher
The Korean Institute of Electrical and Electronic Material Engineers
Related Researcher
  • 최홍수 Choi, Hongsoo Department of Robotics and Mechatronics Engineering
  • Research Interests Micro/Nano robot; Neural prostheses; MEMS; BMI; MEMS/NEMS; BioMEMS; MEMS 초음파 트랜스듀스; 인공와우
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Appears in Collections:
Department of Robotics and Mechatronics Engineering Bio-Micro Robotics Lab 2. Conference Papers

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