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Heated AFM Microcantilever Arraysfor Scalable Manufacturing

Title
Heated AFM Microcantilever Arraysfor Scalable Manufacturing
Authors
Kim, Hoe Joon
DGIST Authors
Kim, Hoe Joon
Issue Date
2018-07-05
Citation
3rd International Conference on Manipulation, Automation and Robotics at Small Scales, MARSS 2018
Type
Conference
ISBN
9781538648414
URI
http://hdl.handle.net/20.500.11750/14878
Publisher
Institute of Electrical and Electronics Engineers Inc.
Related Researcher
  • Author Kim, Hoe Joon Nano Materials and Devices Lab
  • Research Interests MEMS/NEMS; Micro/Nano Sensors; Piezoelectric Devices; Nanomaterials; Heat Transfer; Atomic Force Microscope
Files:
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Collection:
Department of Robotics and Mechatronics EngineeringNano Materials and Devices Lab2. Conference Papers


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