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|Issue Date||Title Author(s) Journal||Views|
31-mode piezoelectric micromachined ultrasonic transducer with PZT thick film by granule spraying in vacuum process
Applied Physics Letters, 110(21)
A top-crossover-to-bottom addressed segmented annular array using piezoelectric micromachined ultrasonic transducers
Journal of Micromechanics and Microengineering, 25(11)
Fabrication of a two-dimensional piezoelectric micromachined ultrasonic transducer array using a top-crossover-to-bottom structure and metal bridge connections
Journal of Micromechanics and Microengineering, 23(12)