Results 1-3 of 3 (Search time: 0.001 seconds).
|Issue Date||Title Author(s) Journal||Views|
A top-crossover-to-bottom addressed segmented annular array using piezoelectric micromachined ultrasonic transducers
Journal of Micromechanics and Microengineering, 25(11)
Fabrication of a two-dimensional piezoelectric micromachined ultrasonic transducer array using a top-crossover-to-bottom structure and metal bridge connections
Journal of Micromechanics and Microengineering, 23(12)
MEMS piezoelectric artificial basilar membrane with passive frequency selectivity for short pulse width signal modulation
Sensors and Actuators, A: Physical, 203, 6-10