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Characterization and Modeling of an Acoustic Sensor Using AlN Thin-Film for Frequency Selectivity

Title
Characterization and Modeling of an Acoustic Sensor Using AlN Thin-Film for Frequency Selectivity
Author(s)
Kim, SangwonSong, Won JoonTang, JongmoonJang, Jeong HunChoi, Hongsoo
Issued Date
2014-01
Citation
Electronic Materials Letters, v.10, no.1, pp.299 - 303
Type
Article
Author Keywords
acoustic sensorAlNFEMfrequency selectivityMEMSpiezoelectric
Keywords
MICROMACHINED ULTRASONIC TRANSDUCERSCOCHLEAR MODELCERAMICS
ISSN
1738-8090
Abstract
In this study, a one-dimensional beam array acoustic sensor was built using microelectromechanical system technology to achieve mechanical frequency selectivity. The acoustic sensor contained 16 beams of various lengths. The frequency selectivity was evaluated with a scanning laser Doppler vibrometer, while applying an alternating current having various frequencies with 2 volts amplitude and 0 volt offset. The beams formed separate band-pass filters in the proximity of the corresponding resonance frequencies in the range of 3 kHz to 13 kHz. The first resonance frequencies of the beams were calculated using finite element analysis to simulate the frequency response. In the finite element analysis models, mode shapes were studied to understand the effect of the beam deformation caused by the residual stress generated during the MEMS fabrication. The measured and simulated first resonance frequencies of the beams provided solid evidence of the tonotopicity of the sensor. © 2014 The Korean Institute of Metals and Materials and Springer Science+Business Media Dordrecht.
URI
http://hdl.handle.net/20.500.11750/45839
DOI
10.1007/s13391-013-3048-8
Publisher
Korean Institute of Metals and Materials
Related Researcher
  • 최홍수 Choi, Hongsoo 로봇및기계전자공학과
  • Research Interests Micro/Nano robot; Neural prostheses; MEMS; BMI; MEMS/NEMS; BioMEMS; MEMS 초음파 트랜스듀스; 인공와우
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Department of Robotics and Mechatronics Engineering Bio-Micro Robotics Lab 1. Journal Articles

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