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Fabrication and characterization of PMN-PT single crystal cantilever array for cochlear-like acoustic sensor

Title
Fabrication and characterization of PMN-PT single crystal cantilever array for cochlear-like acoustic sensor
Authors
Hur, S.Lee, S. Q.Choi, Hong Soo
DGIST Authors
Choi, Hong Soo
Issue Date
2010-01
Citation
Journal of Mechanical Science and Technology, 24(1), 181-184
Type
Article
Article Type
Article; Proceedings Paper
Keywords
PMN-PTPiezoelectricCantilever arrayResonanceAcoustic sensor
ISSN
1738-494X
Abstract
We have successfully fabricated piezoelectric PMN-PT single crystal cantilever array. Each PMN-PT cantilever has a different length to achieve different resonance frequencies. The width and thickness of PMN-PT cantilever array are 200 μm and 10 μm, respectively. Resonance frequencies of PMN-PT cantilevers were measured with laser interferometer, and charge sensitivity was measured with charge-measuring device. PMN-PT cantilever array was installed in a noise-shield case. The array was then exposed to sound pressure frequency corresponding to resonance frequency to measure its sensitivity. The experimental results show that the PMN-PT cantilever array has high sensitivity to the sound pressure. This implies that the single crystal PMN-PT cantilever array is a potential candidate for a cochlear-like acoustic sensor. © KSME & Springer 2010.
URI
http://hdl.handle.net/20.500.11750/6504
DOI
10.1007/s12206-009-1140-7
Publisher
대한기계학회
Related Researcher
  • Author Choi, Hongsoo Bio-Micro Robotics Lab
  • Research Interests Micro/Nano robot; Neural prostheses; MEMS; BMI; MEMS/NEMS; BioMEMS; MEMS 초음파 트랜스듀스; 인공와우
Files:
There are no files associated with this item.
Collection:
Department of Robotics EngineeringBio-Micro Robotics Lab1. Journal Articles


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