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The Impact of Damping on Flicker Frequency Noise of AlN Piezoelectric MEMS Resonators
- The Impact of Damping on Flicker Frequency Noise of AlN Piezoelectric MEMS Resonators
- Kim, Hoe Joon; Segovia-Fernandez, Jeronimo; Piazza, Gianluca
- DGIST Authors
- Kim, Hoe Joon
- Issue Date
- Journal of Microelectromechanical Systems, 26(2), 317-324
- Article Type
- Aluminum nitride contour mode resonator; anchor losses; flicker noise; piezoelectric resonators; phase noise
- This paper presents a detailed study on the effect of damping on flicker frequency (1/f) noise of 1.1-GHz aluminum nitride (AlN) contour mode resonators (CMRs). A total of 52 different AlN CMRs with different sizes, electrode designs, and anchor types are systemically designed and fabricated to give a wide range of quality factors (Q) from 300 to 3500, allowing the study of how two major damping mechanisms in AlN CMRs: 1) anchor losses; and 2) thermoelastic damping affect the resonator 1/f noise. In total, we have measured 1/f noise of 104 CMRs using the modified homodyne noise measurement setup and the results confirm that 1/f noise shows a clear power law dependency ranging from 1/Q2.7 to 1/Q3.5, depending on the main nature of the damping mechanism. Additionally, we have measured 1/f noise of 25 CMRs at 10 K and the results follow the trend observed at ambient temperature. Understanding and accounting for the effect of damping on 1/f noise are crucial for building ultra-low noise microelectromechanical systems resonators for sensing, timing, and frequency applications. © 2016 IEEE.
- Institute of Electrical and Electronics Engineers Inc.
- Related Researcher
Kim, Hoe Joon
Nano Materials and Devices Lab
MEMS/NEMS; Micro/Nano Sensors; Piezoelectric Devices; Nanomaterials; Heat Transfer; Atomic Force Microscope
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- Department of Robotics EngineeringNano Materials and Devices Lab1. Journal Articles
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