Cited 3 time in webofscience Cited 4 time in scopus

The Impact of Damping on Flicker Frequency Noise of AlN Piezoelectric MEMS Resonators

Title
The Impact of Damping on Flicker Frequency Noise of AlN Piezoelectric MEMS Resonators
Authors
Kim, Hoe JoonSegovia-Fernandez, JeronimoPiazza, Gianluca
DGIST Authors
Kim, Hoe Joon
Issue Date
2017-04
Citation
Journal of Microelectromechanical Systems, 26(2), 317-324
Type
Article
Article Type
Article
Keywords
Aluminum nitride contour mode resonatoranchor lossesflicker noisepiezoelectric resonatorsphase noise
ISSN
1057-7157
Abstract
This paper presents a detailed study on the effect of damping on flicker frequency (1/f) noise of 1.1-GHz aluminum nitride (AlN) contour mode resonators (CMRs). A total of 52 different AlN CMRs with different sizes, electrode designs, and anchor types are systemically designed and fabricated to give a wide range of quality factors (Q) from 300 to 3500, allowing the study of how two major damping mechanisms in AlN CMRs: 1) anchor losses; and 2) thermoelastic damping affect the resonator 1/f noise. In total, we have measured 1/f noise of 104 CMRs using the modified homodyne noise measurement setup and the results confirm that 1/f noise shows a clear power law dependency ranging from 1/Q2.7 to 1/Q3.5, depending on the main nature of the damping mechanism. Additionally, we have measured 1/f noise of 25 CMRs at 10 K and the results follow the trend observed at ambient temperature. Understanding and accounting for the effect of damping on 1/f noise are crucial for building ultra-low noise microelectromechanical systems resonators for sensing, timing, and frequency applications. © 2016 IEEE.
URI
http://hdl.handle.net/20.500.11750/6537
DOI
10.1109/JMEMS.2017.2653938
Publisher
Institute of Electrical and Electronics Engineers Inc.
Related Researcher
  • Author Kim, Hoe Joon Nano Materials and Devices Lab
  • Research Interests MEMS/NEMS; Micro/Nano Sensors; Piezoelectric Devices; Nanomaterials; Heat Transfer; Atomic Force Microscope
Files:
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Collection:
Department of Robotics EngineeringNano Materials and Devices Lab1. Journal Articles


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