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Temperature-Stable Piezoelectric MEMS Resonators Using Integrated Ovens and Simple Resistive Feedback Circuits

Title
Temperature-Stable Piezoelectric MEMS Resonators Using Integrated Ovens and Simple Resistive Feedback Circuits
Authors
Xu, ChangtingSegovia-Fernandez, JeronimoKim, Hoe JoonPiazza, Gianluca
DGIST Authors
Kim, Hoe Joon
Issue Date
2017-02
Citation
Journal of Microelectromechanical Systems, 26(1), 187-195
Type
Article
Article Type
Article
Keywords
Constant resistance feedbacklow power ovenizationpiezoelectric MEMS resonatorstemperature compensation
ISSN
1057-7157
Abstract
This paper reports on the design and demonstration of a miniaturized and integrated heater that enables low power ovenization and temperature stability for piezoelectric MEMS resonators. The low power ovenization is implemented by an integrated symmetric oven platform and high thermal-resistance supporting structures. The temperature compensation circuit is formed by a modified Wheatstone bridge with an on-chip dummy resistor and a constant resistance feedback loop is used to stabilize the resonator center frequency over temperature. Through the use of the integrated heater and the simple feedback circuit, we were able to reduce the resonator's intrinsic frequency instability to 100 ppm (from over 2700 ppm) over a temperature range of -35 °C to + 85 °C. Compared with the state of the art, this paper constitutes a fundamental step forward in the demonstration of temperature stable oscillators with a focus on improving resonator temperature stability with very low power consumption. © 1992-2012 IEEE.
URI
http://hdl.handle.net/20.500.11750/6546
DOI
10.1109/JMEMS.2016.2626920
Publisher
Institute of Electrical and Electronics Engineers Inc.
Related Researcher
  • Author Kim, Hoe Joon Nano Materials and Devices Lab
  • Research Interests MEMS/NEMS; Micro/Nano Sensors; Piezoelectric Devices; Nanomaterials; Heat Transfer; Atomic Force Microscope
Files:
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Collection:
Department of Robotics EngineeringNano Materials and Devices Lab1. Journal Articles


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