Fabrication and characterization of superconducting coplanar waveguide resonators
- Title
- Fabrication and characterization of superconducting coplanar waveguide resonators
- Author(s)
- Kim, Bongkeon ; Jung, Minkyung ; Kim, Jihwan ; Suh, Junho ; Doh, Yong-Joo
- Issued Date
- 2020-12
- Citation
- Progress in Superconductivity and Cryogenics, v.22, no.4, pp.10 - 13
- Type
- Article
- Author Keywords
- Superconducting resonator ; Coplanar waveguide ; Circuit quantum electrodynamics
- Keywords
- Coplanar waveguides ; Fabrication ; Resonators ; Superconducting devices ; Fabrication and characterizations ; Fabrication technique ; Intrinsic quality factors ; Quantum information device ; Resonant characteristics ; Semiconductor nanostructures ; Superconducting qubits ; Waveguide resonators ; Superconducting resonators
- ISSN
- 1229-3008
- Abstract
- High-quality superconducting coplanar waveguide (SCPW) resonators are crucial for developing superconducting quantum information devices and sensors. We designed quarter-wavelength SCPW resonators and fabricated the SCPW resonators using Nb thin film. The resonant characteristics were measured at T = 4.2 K, revealing the intrinsic quality factor and the coupling quality factor to be Qi = 4,784 and Qc = 17, 980, respectively. Our design and fabrication techniques would be very useful to develop a gate-tunable superconducting qubit based on the semiconductor nanostructures. © 2020, Korea Institute of Applied Superconductivity and Cryogenics. All rights reserved.
- Publisher
- 한국초전도.저온공학회
- Related Researcher
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Jung, Minkyung
- Research Interests nanoelectronics; quantum transport; quantum physics; qubit; condensed matter physics
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