Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 한상윤 | - |
| dc.contributor.author | Do Y. Kim | - |
| dc.date.accessioned | 2022-03-07T16:00:37Z | - |
| dc.date.available | 2022-03-07T16:00:37Z | - |
| dc.date.issued | 2022 | - |
| dc.identifier.uri | http://dgist.dcollection.net/common/orgView/200000596371 | en_US |
| dc.identifier.uri | http://hdl.handle.net/20.500.11750/16321 | - |
| dc.description | Silicon Photonics, Silicon Photonic MEMS, Photonic Integrated Circuits, Programmable Photonics, Programmable Photonic Array | - |
| dc.description.statementofresponsibility | N | - |
| dc.description.tableofcontents | Ⅰ. Introduction 1 1.1 Motivation 1 Ⅱ. Device Architecture 4 2.1 Device Concept 4 2.2 MEMS Devices 6 2.2.1 Cantilever Type MEMS Directional Coupler 7 2.2.2 Vertical Comb Type MEMS Directional Coupler 12 2.2.3 Inplane Comb drive Type Phase Shifter 14 Ⅲ. Results 19 3.1 Fabrication Process 19 3.2 Fabrication Results 21 3.3 Experiment Setup 24 3.4 MEMS Devices Actuation 25 3.4.1 Cantilever Type MEMS Directional Coupler Actuation 25 3.4.2 Inplane Comb drive Type Phase Shifter Actuation 26 3.5 Device Configurations 27 3.5.1 Ring Resonator 29 3.5.2 Coupled Resonator Optical Waveguides (CROWs) 31 3.5.3 Mach Zehnder Interferometer (MZI) 33 3.6 Packaging 34 Ⅳ. Conclusion 36 References 37 요약문 41 |
- |
| dc.format.extent | 41 | - |
| dc.language | eng | - |
| dc.publisher | DGIST | - |
| dc.subject | Silicon Photonics, Silicon Photonic MEMS, Photonic Integrated Circuits, Programmable Photonics, Programmable Photonic Array | - |
| dc.title | Scalable Recirculating Programmable Silicon Photonic MEMS | - |
| dc.type | Thesis | - |
| dc.identifier.doi | 10.22677/thesis.200000596371 | - |
| dc.description.degree | Master | - |
| dc.contributor.department | Robotics Engineering | - |
| dc.contributor.coadvisor | Jaesok Yu | - |
| dc.date.awarded | 2022/02 | - |
| dc.publisher.location | Daegu | - |
| dc.description.database | dCollection | - |
| dc.citation | XT.RM 김25 202202 | - |
| dc.date.accepted | 1/21/22 | - |
| dc.contributor.alternativeDepartment | 로봇공학전공 | - |
| dc.embargo.liftdate | 20270228 | - |
| dc.contributor.affiliatedAuthor | Do Y. Kim | - |
| dc.contributor.affiliatedAuthor | Sangyoon Han | - |
| dc.contributor.affiliatedAuthor | Jaesok Yu | - |
| dc.contributor.alternativeName | 김도윤 | - |
| dc.contributor.alternativeName | Sangyoon Han | - |
| dc.contributor.alternativeName | 유재석 | - |
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