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Influence of mechanical coupling by SiO2 membrane on the frequency selectivity of microfabricated beam arrays for artificial basilar membranes

Title
Influence of mechanical coupling by SiO2 membrane on the frequency selectivity of microfabricated beam arrays for artificial basilar membranes
Authors
Song, WJ[Song, Won Joon]Jang, J[Jang, Jongmoon]Kim, S[Kim, Sangwon]Choi, H[Choi, Hongsoo]
DGIST Authors
Jang, J[Jang, Jongmoon]; Kim, S[Kim, Sangwon]; Choi, H[Choi, Hongsoo]
Issue Date
2015-03
Citation
Journal of Mechanical Science and Technology, 29(3), 963-971
Type
Article
Article Type
Article
Keywords
Acoustic TransducersAcousticsArtificial Basilar MembraneBandpass FiltersBasilar MembranesFrequency SelectivityLumped Parametric ModelMechanical CouplingMembranesMEMSMicrofabricationNoise AbatementResonance FrequenciesResonator ArrayResonator ArraysResonatorsScanning Laser-Doppler VibrometerTonotopy
ISSN
1738-494X
Abstract
Two types of microfabricated acoustic transducers—the resonator array of isolated beams (RAIB) and the resonator array of coupled beams (RACB)—were built using MEMS technology. The frequency selectivity of the two types of transducers was qualitatively compared using the transfer functions measured with a scanning laser Doppler vibrometer (SLDV). Each RAIB beam operated as a band-pass filter in the proximity to the corresponding resonance frequency, thereby showing the frequency-selective feature of the basilar membrane (BM). However, the frequency selectivity of RACB was poor because the SiO2 membrane, which mechanically coupled the neighboring beams, suppressed the independent response of each beam. The influence of the mechanical coupling of the SiO2 membrane was simulated using lumped parametric models. Simulation results showed that the coupling stiffness of the SiO2 membrane may significantly undermine the frequency selectivity of the resonator array. The comparison of the frequency-selective performance revealed that RAIB is a better option than RACB for mimicking the tonotopy of BM. © 2015, The Korean Society of Mechanical Engineers and Springer-Verlag Berlin Heidelberg.
URI
http://hdl.handle.net/20.500.11750/1666
DOI
10.1007/s12206-015-0210-2
Publisher
Korean Society of Mechanical Engineers
Related Researcher
  • Author Choi, Hong Soo Bio-Micro Robotics Lab
  • Research Interests Micro/Nano robot; Neural prostheses; MEMS; BMI; MEMS/NEMS; BioMEMS; MEMS 초음파 트랜스듀스; 인공와우
Files:
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Collection:
Robotics EngineeringETC1. Journal Articles


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