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Experimental study of a biomimetic artificial basilar membrane fabricated using piezoelectric micromachined beams

Title
Experimental study of a biomimetic artificial basilar membrane fabricated using piezoelectric micromachined beams
Authors
Kim, Sang WonChoi, Hong Soo
DGIST Authors
Kim, Sang Won; Choi, Hong Soo
Issue Date
2011
Citation
2011 IEEE International Ultrasonics Symposium, IUS 2011, 208-211
Type
Conference
Article Type
Conference Paper
ISBN
9780000000000
ISSN
1948-5719
Abstract
The basilar membrane and hair cells are the main parts of the mammalian cochlea, which converts external sound into bioelectrical signals, in the inner ear,. Loss of hair cells on the basilar membrane in the cochlea is one of the main causes of hearing loss. An artificial basilar membrane (ABM) was developed as a MEMS acoustic sensor using a piezoelectric beam array based on MEMS technology. The lengths and thicknesses of the beams were calculated and determined prior to the design of the photomasks. An aluminum nitride (AlN) thin film was selected as the active piezoelectric layer for the ABM. The impedance magnitudes and phase angles of each beam are measured with an impedance analyzer and a probe station in air. The fabricated ABM contains 16 beams with various lengths ranging from 300 μm to 3300 μm along a trapezoidal shape in the array. The width of the beams is fixed at 200 μm and the thickness of the active AlN thin film is 500 nm. It is observed that the resonance frequencies tend to decreased from 233.3 kHz to 214.6 kHz as the beam length was increased. It is concluded that the fabricated AlN ABM can potentially be used as an acoustic sensor in a total implantable artificial cochlea. © 2011 IEEE.
URI
http://hdl.handle.net/20.500.11750/1826
DOI
10.1109/ULTSYM.2011.0052
Publisher
Institute of Electrical and Electronics Engineers
Related Researcher
  • Author Choi, Hong Soo Bio-Micro Robotics Lab
  • Research Interests Micro/Nano robot; Neural prostheses; MEMS; BMI; MEMS/NEMS; BioMEMS; MEMS 초음파 트랜스듀스; 인공와우
Files:
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Collection:
Robotics EngineeringETC2. Conference Papers


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