Full metadata record
DC Field | Value | Language |
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dc.contributor.author | Ahn, Cheol Hyoun | - |
dc.contributor.author | Kim, Jae Hyun | - |
dc.contributor.author | Cho, Hyung Koun | - |
dc.date.available | 2017-07-05T09:00:01Z | - |
dc.date.created | 2017-04-10 | - |
dc.date.issued | 2012 | - |
dc.identifier.issn | 0013-4651 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11750/2479 | - |
dc.description.abstract | Hf:ZnO thin films doped with various Hf contents were prepared at 200°C by atomic layer deposition and assessed as transparent conductive oxides. Low Hf contents (≤6.7 at%) resulted in highly conductive polycrystalline thin films; high Hf contents reduced both crystallinity and conductivity due to the limited solubility of Hf in the ZnO matrix. The lowest electrical resistivity of 6 × 10 -4 Ω · cm and high electron density of 3 × 10 20 cm -3 were shown by the sample with 3.3 at% Hf. All the thin films showed ca. 80% transmittance in the visible region. The films' optical band-gaps increased from 3.29 to 3.56 eV with increasing Hf content up to 6.7 at%; further increases resulted in deviation from the Burstein-Moss effect and excess Hf incorporation induced two band edges due to phase separation, which was correlated with X-ray photoelectron spectroscopy and photoluminescence results. © 2012 The Electrochemical Society. | - |
dc.publisher | Electrochemical Society | - |
dc.title | Tunable Electrical and Optical Properties in Composition Controlled Hf:ZnO Thin Films Grown by Atomic Layer Deposition | - |
dc.type | Article | - |
dc.identifier.doi | 10.1149/2.026204jes | - |
dc.identifier.wosid | 000300488300087 | - |
dc.identifier.scopusid | 2-s2.0-84863171064 | - |
dc.identifier.bibliographicCitation | Journal of the Electrochemical Society, v.159, no.4, pp.H384 - H387 | - |
dc.subject.keywordPlus | Atomic Layer Deposition | - |
dc.subject.keywordPlus | Band Edge | - |
dc.subject.keywordPlus | Band Gaps | - |
dc.subject.keywordPlus | Burstein-Moss Effects | - |
dc.subject.keywordPlus | Crystallinities | - |
dc.subject.keywordPlus | Electric Conductivity | - |
dc.subject.keywordPlus | Electrical and Optical Properties | - |
dc.subject.keywordPlus | Electrical Resistivity | - |
dc.subject.keywordPlus | Ga-Doped ZnO | - |
dc.subject.keywordPlus | Hafnium | - |
dc.subject.keywordPlus | High-Electron-Density | - |
dc.subject.keywordPlus | HIGHLY TRANSPARENT | - |
dc.subject.keywordPlus | Metallic Films | - |
dc.subject.keywordPlus | Optical Films | - |
dc.subject.keywordPlus | Optical Properties | - |
dc.subject.keywordPlus | Phase Separation | - |
dc.subject.keywordPlus | Polycrystalline Thin Film | - |
dc.subject.keywordPlus | Semiconductor Quantum Wells | - |
dc.subject.keywordPlus | STABILITY | - |
dc.subject.keywordPlus | Thin Films | - |
dc.subject.keywordPlus | TRANSISTORS | - |
dc.subject.keywordPlus | Transparent Conductive Oxides | - |
dc.subject.keywordPlus | Visible Region | - |
dc.subject.keywordPlus | X Ray Photoelectron Spectroscopy | - |
dc.subject.keywordPlus | Zinc Oxide | - |
dc.subject.keywordPlus | ZnO Matrix | - |
dc.citation.endPage | H387 | - |
dc.citation.number | 4 | - |
dc.citation.startPage | H384 | - |
dc.citation.title | Journal of the Electrochemical Society | - |
dc.citation.volume | 159 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Electrochemistry; Materials Science | - |
dc.relation.journalWebOfScienceCategory | Electrochemistry; Materials Science, Coatings & Films | - |
dc.type.docType | Article | - |
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