Cited 4 time in webofscience Cited 1 time in scopus

Formation of Macropore and Three-Dimensional Nanorod Array in p-Type Silicon

Title
Formation of Macropore and Three-Dimensional Nanorod Array in p-Type Silicon
Authors
Kim, KP[Kim, Kang-Pil]Li, SQ[Li, Shiqiang]Lyu, HK[Lyu, Hong-Kun]Woo, SH[Woo, Sung-Ho]Lim, SK[Lim, Sang Kyoo]Chang, D[Chang, Daeic]Oh, HS[Oh, Hwa Sub]Hwang, DK[Hwang, Dae-Kue]
DGIST Authors
Kim, KP[Kim, Kang-Pil]Lyu, HK[Lyu, Hong-Kun]Woo, SH[Woo, Sung-Ho]Lim, SK[Lim, Sang Kyoo]; Chang, D[Chang, Daeic]
Issue Date
2010-05
Citation
Japanese Journal of Applied Physics, 49(5)
Type
Article
Article Type
Article
Keywords
AproticAspect RatioChemicals Removal (Water Treatment)Deionized WaterElectrochemical EtchingElectrolyte CompositionsElectrolytesHigh Aspect RatioHydrogen FluorideMacro-PoresMacroporous SiMask PatternsMasksNanorod ArraysNanorodsOptimizationOrganic ElectrolyteP-Type SiliconPore Wall ThicknessPorous SiliconThree-Dimensional StructureThree Dimensional
ISSN
0021-4922
Abstract
We carried out a study on the change in pore wall thickness depending on the current density in p-type silicon. We attempted the formation of a uniform macropore or nanorod array with a high aspect ratio in p-type silicon by electrochemical etching through the optimization of the hydrogen fluoride (HF)/organic electrolyte composition and the design of the mask pattern. The electrochemical etching of p-type silicon in the HF : dimethylsulfoxide (DMSO) : deionized (DI) water 1/4 1 : 5 : 5 electrolyte can control the velocity of a reaction between an electrolyte and a hole necessary for the electrochemical etching of silicon through the mixing of the protic property of DI water and the aprotic property of DMSO. In this study, we fabricated a p-type silicon nanorod array of three-dimensional structures with an approximately 350nm diameter from macroporous Si by applying two-step currents (40 mA, 200 s + 38 mA, 1600 s) to a 1.8 cm2 circular area using an optimized HF : DMSO : DI water 1/4 1 : 5 : 5 electrolyte composition. © 2010 The Japan Society of Applied Physics.
URI
http://hdl.handle.net/20.500.11750/2494
DOI
10.1143/JJAP.49.056503
Publisher
Institute of Physics Publishing
Related Researcher
Files:
There are no files associated with this item.
Collection:
Division of IoT∙Robotics Convergence Research1. Journal Articles
Division of Nano∙Energy Convergence Research1. Journal Articles
ETC1. Journal Articles
Intelligent Devices and Systems Research Group1. Journal Articles


qrcode mendeley

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE