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The field emission characteristics of a unit pixel of a 7 x 7 array oxidized porous polysilicon field emitter

Title
The field emission characteristics of a unit pixel of a 7 x 7 array oxidized porous polysilicon field emitter
Authors
You, SW[You, Sung Won]Kim, JE[Kim, Jin Eui]Jang, IH[Jang, In Ho]Choi, SY[Choi, Sie-Young]Sohn, YS[Sohn, Young-Soo]
DGIST Authors
Sohn, YS[Sohn, Young-Soo]
Issue Date
2007
Citation
Molecular Crystals and Liquid Crystals, 470, 403-U14
Type
Article
Article Type
Article; Proceedings Paper
Keywords
7 × 7 ArrayElectrodesField EmissionField Emission DisplayField Emission DisplaysField EmitterField EmittersOxidationPixelsPolysiliconPorous PolysiliconPorous SiliconThermal-OxidationThickness MeasurementUnit Pixel
ISSN
1542-1406
Abstract
We fabricated oxidized porous polysilicon (OPPS) field emitters and investigated their field emission characteristics using a Ti/Pt multi-layer electrode of different thicknesses and OPPS emitters, which were patterned in a 7 × 7 array. Each unit pixel of the 7 × 7 array OPPS on the field emitter, with a structure of Pt/OPPS/n-type Si, was in operation and their field emission characteristics were investigated using a thermal oxidation process with a Ti/Pt multi-layer electrode. A non-doped polysilicon layer 1.75 μm is deposited on a heavily doped n-type silicon wafer and anodized in a solution of HF (50%):ethanol in a 1:1 ratio. The Ti/Pt multi-layer electrodes were formed with different thicknesses using a DC sputter. The achieved higher emission efficiency of the Ti/Pt electrode, with thickness of 2 nm/7 nm was 1.57% at Vps = 20 V. The investigated field emission characteristics of the unit pixel also demonstrated good uniformity.
URI
http://hdl.handle.net/20.500.11750/2523
DOI
10.1080/15421400701503816
Publisher
Taylor and Francis Ltd.
Files:
There are no files associated with this item.
Collection:
School of Undergraduate Studies1. Journal Articles


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