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Debye Length and Active Layer Thickness-Dependent Performance Variations of Amorphous Oxide-Based TFTs

Title
Debye Length and Active Layer Thickness-Dependent Performance Variations of Amorphous Oxide-Based TFTs
Authors
Jeong, J[Jeong, Jaewook]Hong, Y[Hong, Yongtaek]
DGIST Authors
Jeong, J[Jeong, Jaewook]
Issue Date
2012-03
Citation
IEEE Transactions on Electron Devices, 59(3), 710-714
Type
Article
Article Type
Article
Keywords
Active LayerAmorphous Indium-Gallium-Zinc-Oxide (A-IGZO)Debye LengthDepletion ModesDevice SimulatorsField Effect TransistorsGalliumInverse ProportionsLight IlluminationNegative Shiftoff CurrentOxide BasedPerformance VariationsSemiconducting IndiumSemiconducting Organic CompoundsSimulationSquare RootsThin-Film Transistor (TFT)Thin-Film Transistors (TFTs)Threshold VoltageThreshold Voltage Shift
ISSN
0018-9383
Abstract
We analyzed the active layer thickness-dependent performance variations of amorphous oxide-based semiconductor thin-film transistors (AOS TFTs), which are typically operated in depletion mode by using an ATLAS 2-D device simulator. The negative shift of threshold voltage was originated from increasing the amount of intrinsic carrier as active layer thickness is increased. On the contrary, off-current level was a function of Debye length, which is in inverse proportion to the square root of carrier density and the amount of valence band deep states, as well as active layer thickness. Therefore, the relation between Debye length and active layer thickness determines the off-current level, which also enables to explain the off-current behavior of AOS TFTs under light illumination. © 2011 IEEE.
URI
http://hdl.handle.net/20.500.11750/3384
DOI
10.1109/TED.2011.2180908
Publisher
Institute of Electrical and Electronics Engineers Inc.
Files:
There are no files associated with this item.
Collection:
ETC1. Journal Articles


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