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Fabrication of Ordered Silicon Wire Structures via Macropores without Pore Wall by Electrochemical Etching

Title
Fabrication of Ordered Silicon Wire Structures via Macropores without Pore Wall by Electrochemical Etching
Authors
Jang, HS[Jang, Hwan Soo]Choi, HJ[Choi, Ho-Jin]Lee, H[Lee, Hochun]Kim, JH[Kim, Jae Hyun]
DGIST Authors
Jang, HS[Jang, Hwan Soo]; Lee, H[Lee, Hochun]Kim, JH[Kim, Jae Hyun]
Issue Date
2012
Citation
Journal of the Electrochemical Society, 159(2), D37-D45
Type
Article
Article Type
Article
Keywords
Aspect RatioBack-ContactElectrochemical EtchingEtching DepthEtching RateHigh Aspect RatioMacroporesMulti-Layer StructuresPore WallSilicon StructuresSilicon WiresWire
ISSN
0013-4651
Abstract
The formation of ordered various silicon structures was investigated by varying the parameters of electrochemical etching such as current density, concentration and temperature of electrolyte, back contact material, and pre-patterned size. The silicon wires with a high aspect ratio of more than 15 are formed uniformly over a large area from a wide range of current density below J ps and the etching rate of those are varied from 0.25 to 0.85 μm/min. We also found that there is limitation for fabricating the silicon wires as the etching depth increases. In addition, the three-dimensional multi-layer structures comprised of wires and macropores and the large and clear macropores having the diameter of more than 5 μm without additional process are produced. Furthermore, the embossed silicon wires are obtained by post-KOH etching. © 2011 The Electrochemical Society.
URI
http://hdl.handle.net/20.500.11750/3410
DOI
10.1149/2.001202jes
Publisher
Electrochemical Society
Related Researcher
  • Author Lee, Ho Chun Electrochemistry Laboratory for Sustainable Energy(ELSE)
  • Research Interests Lithium-ion batteries; Novel Materials for rechargeable batteries; Novel energy conversion;storage systems; Electrochemistry; 리튬이차전지; 이차전지용 신규 전극 및 전해액; 신규 에너지변환 및 저장 시스템; 전기화학
Files:
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Collection:
Energy Science and EngineeringElectrochemistry Laboratory for Sustainable Energy(ELSE)1. Journal Articles
Division of Nano∙Energy Convergence Research1. Journal Articles
Smart Textile Convergence Research Group1. Journal Articles


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