Cited 2 time in webofscience Cited 2 time in scopus

Design and fabrication of a vibration sensor using a conductive ball

Title
Design and fabrication of a vibration sensor using a conductive ball
Authors
Cho, YS[Cho, Yong-Soo]Jang, SW[Jang, Sung-Wook]Sohn, YS[Sohn, Young-Soo]Choi, SY[Choi, Sie-Young]
DGIST Authors
Sohn, YS[Sohn, Young-Soo]
Issue Date
2007-03
Citation
Microelectronics Journal, 38(3), 416-421
Type
Article
Article Type
Article
Keywords
AnisotropyConductive BallConvex Corner RoundingEncapsulationMEMSMetallic FilmsMicromachiningSensorsVibration MeasurementVibration SensorVibration Sensors
ISSN
0026-2692
Abstract
We have fabricated a MEMS-based vibration sensor with a conductive ball. The vibration sensor consisted of a conductive ball placed in a 600 μm deep anisotropically micromachined silicon cavity, two electrodes on the non-planar surface, and a cover glass for encapsulation. Before Au film deposition, the sharp convex corner at the upper edge of the cavity was rounded to deposit the metal film without disconnecting on the non-planar surface. The shadow-mask technique allowed for the simultaneous metal deposition and patterning on three-dimensional structures without the conventional photolithography. The frequency responses of the proposed MEMS-based vibration sensor using a conductive ball ranging from 0 to 30 Hz were stable. © 2007 Elsevier Ltd. All rights reserved.
URI
http://hdl.handle.net/20.500.11750/3588
DOI
10.1016/j.mejo.2007.01.007
Publisher
Elsevier Ltd.
Files:
There are no files associated with this item.
Collection:
School of Undergraduate Studies1. Journal Articles


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