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Optical properties of subwavelength patterned metal gratings for photonic device application and an alternative proposal

Title
Optical properties of subwavelength patterned metal gratings for photonic device application and an alternative proposal
Authors
Lyu, Hong-KunWoo, SunghoJo, Sung-HyunShin, Jang-Kyoo
DGIST Authors
Lyu, Hong-KunWoo, Sungho; Jo, Sung-Hyun
Issue Date
2013
Citation
Nanoengineering: Fabrication, Properties, Optics, and Devices X, 8816
Type
Conference
Article Type
Conference Paper
ISBN
9780000000000
ISSN
0277-786X
Abstract
We investigated optical properties of subwavelength patterned metal gratings for photonic device application. It was known that optical transmittance of metal films with subwavelength periodic hole arrays can be controlled by applying a dielectric overlay to the film and the films can act as wavelength or frequency selective filters. Following advancement in lithography technology it could be applied up to complementary metal oxide semiconductor (CMOS) image sensors (CIS) by patterning metal layers placed on each pixel's photo detective device. However it is not easy to replace organic color filters applied on CIS up to date because the standard CIS structure has multi-metal layers, thick dielectric layers, and too thick metal layers. In this work, we explore possibility to integrate the metal film into a CIS chip and present an alternative proposal by computer simulation utilizing finite-difference time-domain (FDTD) method. We applied aluminum (Al) for the metal film and the dispersion information associated with Al was derived from the Lorentz-Drude model. We expect that this work could contribute to search to apply subwavelength patterned metal gratings to photonic devices. © 2013 SPIE.
URI
http://hdl.handle.net/20.500.11750/3811
DOI
10.1117/12.2024227
Publisher
SPIE
Related Researcher
Files:
There are no files associated with this item.
Collection:
Emerging Materials ScienceNanoscale Optoelectronic Materials Laboratory2. Conference Papers
Intelligent Devices and Systems Research Group2. Conference Papers


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