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Uniformity enhancement of LC inorganic alignment layer deposited by the obliquely oriented incidence direction of sputtering

Title
Uniformity enhancement of LC inorganic alignment layer deposited by the obliquely oriented incidence direction of sputtering
Authors
Kim, JunghoLee, Gwang JunYang, Kee-JeongLyu, Hong-KunChoi, Byeong-Dae
DGIST Authors
Kim, Jungho; Lee, Gwang Jun; Yang, Kee-JeongLyu, Hong-KunChoi, Byeong-Dae
Issue Date
2010
Citation
17th International Display Workshops, IDW'10, 1, 85-87
Type
Conference
Article Type
Conference Paper
Abstract
An inorganic LC alignment layer is widely investigated because of thermal and photochemical stability of LC alignment layer. For uniform LC alignment layer, we compared the conventional oblique deposition with 2-step oblique deposition method by sputtering techniques. © 2010 ITE and SID.
URI
http://hdl.handle.net/20.500.11750/3962
Publisher
Society for Information Display
Related Researcher
Files:
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Collection:
Information and Communication EngineeringAdvanced Electronic Devices Research Group(AEDRG)2. Conference Papers
Division of IoT∙Robotics Convergence Research2. Conference Papers
Division of Nano∙Energy Convergence Research2. Conference Papers


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