Cited 3 time in webofscience Cited 5 time in scopus

Tip-Based Nanofabrication for Scalable Manufacturing

Title
Tip-Based Nanofabrication for Scalable Manufacturing
Authors
Hu, HuanKim, Hoe JoonSomnath, Suhas
DGIST Authors
Kim, Hoe Joon
Issue Date
2017-03
Citation
Micromachines, 8(3)
Type
Article
Article Type
Review
Keywords
Atomic Force MicroscopeAtomic Force MicroscopeAtomic Force MicroscopeAtomic Force Microscopy (AFM)Chemical MechanismData StorageDip Pen NanolithographyDirect DeliveryIndustrial ResearchManufactureNano ManufacturingNano Manufacturing TechnologyNano Meter ScaleNanofabrication TechniquesNanofountain ProbeNanometer Scale LithographyNanotechnologyNear FieldScalable NanomanufacturingScalable NanomanufacturingScanning Probe LithographyScanning Probe LithographyScanning Tunneling MicroscopeScanning Tunneling MicroscopeScanning Tunneling MicroscopeScanning Tunneling MicroscopySilicon Microcantilever HeatersState of the Art TechniquesTechnology DevelopmentThermal ProbeTip Based NanofabricationTip Based Nanofabrication
ISSN
2072-666X
Abstract
Tip-based nanofabrication (TBN) is a family of emerging nanofabrication techniques that use a nanometer scale tip to fabricate nanostructures. In this review we first introduce the history of the TBN and the technology development. We then briefly review various TBN techniques that use different physical or chemical mechanisms to fabricate features and discuss some of the state-of-the-art techniques. Subsequently we focus on those TBN methods that have demonstrated potential to scale up the manufacturing throughput. Finally we discuss several research directions that are essential for making TBN a scalable nano-manufacturing technology. © 2017 by the authors.
URI
http://hdl.handle.net/20.500.11750/4224
DOI
10.3390/mi8030090
Publisher
MDPI AG
Related Researcher
  • Author Kim, Hoe Joon Nano Materials and Devices Lab
  • Research Interests MEMS/NEMS; Micro/Nano Sensors; Piezoelectric Devices; Nanomaterials; Heat Transfer; Atomic Force Microscope
Files:
There are no files associated with this item.
Collection:
Robotics EngineeringETC1. Journal Articles


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