Programmable Photonic Integrated Circuits Using Low Power Consumption MEMS
- Title
- Programmable Photonic Integrated Circuits Using Low Power Consumption MEMS
- Author(s)
- Man J. Her
- DGIST Authors
- Man J. Her ; Sangyoon Han ; Jaesok Yu
- Advisor
- 한상윤
- Co-Advisor(s)
- Jaesok Yu
- Issued Date
- 2023
- Awarded Date
- 2023-02-01
- Type
- Thesis
- Description
- silicon photonics, photonic integrated circuits, FPPGA, programmable, MEMS
- Table Of Contents
-
Ⅰ. Introduction 1
1.1 Motivation 1
Ⅱ. Device Architecture 4
2.1 MEMS Devices 4
2.1.1 Vertical Comb-Type MEMS Tunable Directional Coupler 4
2.1.2 Vertical Comb-Type MEMS Tunable Phase Shifter 10
2.1.3 In-plane Comb-Type MEMS Tunable Phase Shifter 15
2.2 Device Concept 19
2.2.1 Sagnac Loop Reflector 19
2.2.2 Field Programmable Photonic Gate Array 21
Ⅲ. Results 24
3.1 Fabrication 24
3.1.1 Fabrication Process 24
3.1.2 Fabrication Results 26
3.2 MEMS Devices 28
3.2.1 Vertical Comb-Type MEMS Tunable Directional Coupler 28
3.2.2 In-plane Comb-Type MEMS Tunable Phase Shifter 30
3.3 Device Configurations 31
3.3.1 Sagnac Loop Reflector 31
3.3.2 Field Programmable Photonic Gate Array 34
Ⅳ. Conclusion 39
References 40
- URI
-
http://hdl.handle.net/20.500.11750/45718
http://dgist.dcollection.net/common/orgView/200000656269
- Degree
- Master
- Publisher
- DGIST
- Related Researcher
-
-
Han, Sangyoon
- Research Interests Nanophotonic devices; photonic integrated circuits; optical neural networks; optical MEMS
-
- Files in This Item:
-
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- Appears in Collections:
- Department of Robotics and Mechatronics Engineering Theses Master
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