On-chip programmable Mach-Zehnder Interferometer based on silicon photonic MEMS
- Title
- On-chip programmable Mach-Zehnder Interferometer based on silicon photonic MEMS
- Alternative Title
- 실리콘 포토닉 멤스 기반 온-칩 프로그래머블 마하-젠더 간섭계
- Author(s)
- Myeongseok Hong
- DGIST Authors
- Myeongseok Hong ; Sangyoon Han ; Jaesok Yu
- Advisor
- 한상윤
- Co-Advisor(s)
- Jaesok Yu
- Issued Date
- 2024
- Awarded Date
- 2024-02-01
- Type
- Thesis
- Description
- 실리콘 포토닉스;Silicon photonics
- Table Of Contents
-
Ⅰ. Introduction 1
1.1 Motivation 1
1.1.1 Integrated Mach-Zehnder Interferometer (MZI) 1
1.1.2 Tunable delay line · 2
1.1.3 Advantages of programmable MZI with MEMS-based tunable delay line 4
Ⅱ. Device Architecture 7
2.1 Overall architecture of the device · 7
2.2 Unit delay cell and MEMS-tunable directional coupler 8
Ⅲ. Method 12
3.1 Device design · 12
3.1.1 Optical design of MEMS-tunable coupler 12
3.1.2 Mechanical design of MEMS-tunable coupler 15
3.2 Device fabrication · 16
Ⅳ. Experiment 18
4.1 Experimental setup 18
4.2 Response of programmable MZI 18
4.2.1 Free spectral range tuning 18
4.2.2 Extinction ratio tuning 20
4.3 Mechanical response of MEMS-tunable coupler 21
4.3.1 Time response · 21
4.3.2 Electrical power consumption · 22
Ⅴ. Future work 24
Ⅵ. Conclusion 25
Ⅶ. Appendix: Fabrication process 26
References 28
- URI
-
http://hdl.handle.net/20.500.11750/48078
http://dgist.dcollection.net/common/orgView/200000725378
- Degree
- Master
- Publisher
- DGIST
- Related Researcher
-
-
Han, Sangyoon
- Research Interests Nanophotonic devices; photonic integrated circuits; optical neural networks; optical MEMS
-
- Files in This Item:
-
There are no files associated with this item.
- Appears in Collections:
- Department of Robotics and Mechatronics Engineering Theses Master
Items in Repository are protected by copyright, with all rights reserved, unless otherwise indicated.