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Review of piezoelectric micromachined ultrasonic transducers and their applications

Title
Review of piezoelectric micromachined ultrasonic transducers and their applications
Authors
Jung, Joon-TaekLee, Won-JunKang, Woo-JinShin, Eun-JungRyu, Jung-HoChoi, Hong-Soo
DGIST Authors
Choi, Hong-Soo
Issue Date
2017-11
Citation
Journal of Micromechanics and Microengineering, 27(11)
Type
Article
Article Type
Review
Keywords
Aerosol Deposition MethodcMUT ArraysEnergyHarvesterIntravascular UltrasoundLow-PowerLow-TemperatureMEMSMicroelectromechanical System (MEMS)Morphotropic Phase-BoundaryPiezoelectricpMUTPZT Thin-FilmsUltrasonic TransducerVerification System
ISSN
0960-1317
Abstract
In recent decades, micromachined ultrasonic transducers (MUTs) have been investigated as an alternative to conventional piezocomposite ultrasonic transducers, primarily due to the advantages that microelectromechanical systems provide. Miniaturized ultrasonic systems require ultrasonic transducers integrated with complementary metal-oxide-semiconductor circuits. Hence, piezoelectric MUTs (pMUTs) and capacitive MUTs (cMUTs) have been developed as the most favorable solutions. This paper reviews the basic equations to understand the characteristics of thin-film-based piezoelectric devices and presents recent research on pMUTs, including current approaches and limitations. Methods to improve the coupling coefficient of pMUTs are also investigated, such as device structure, materials, and fabrication techniques. The device structure improvements include multielectrode pMUTs, partially clamped boundary conditions, and 3D pMUTs (curved and domed types), where the latter can provide an electromechanical coupling coefficient of up to 45%. The piezoelectric coefficient (e(31)) can be increased by controlling the crystal texture (seed layer of gamma-Al2O3), using single-crystal (PMN-PT) materials, or control of residual stresses (using SiO2 layer). Arrays of pMUTs can be implemented for various applications including intravascular ultrasound, fingerprint sensors, rangefinders in air, and wireless power supply systems. pMUTs are expected to be an ideal solution for applications such as mobile biometric security (fingerprint sensors) and rangefinders due to their superior power efficiency and compact size.
URI
http://hdl.handle.net/20.500.11750/4991
DOI
10.1088/1361-6439/aa851b
Publisher
IOP PUBLISHING LTD
Related Researcher
  • Author Choi, Hong Soo Bio-Micro Robotics Lab
  • Research Interests Micro/Nano robot; Neural prostheses; MEMS; BMI; MEMS/NEMS; BioMEMS; MEMS 초음파 트랜스듀스; 인공와우
Files:
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Collection:
Robotics EngineeringBio-Micro Robotics Lab1. Journal Articles


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