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Fabrication and Characteristics of mc-Si Solar Cells with RIE-Textured Surface

Title
Fabrication and Characteristics of mc-Si Solar Cells with RIE-Textured Surface
Authors
Park, KM[Park, Kwang Mook]Lee, MB[Lee, Myoung Bok]Jung, JH[Jung, Ji Hee]Choi, SY[Choi, Sie Young]
DGIST Authors
Jung, JH[Jung, Ji Hee]
Issue Date
2012
Citation
Molecular Crystals and Liquid Crystals, 565, 115-123
Type
Article
Article Type
Article
Keywords
Dark I-V CurveEmitter LayerEmitter LayersEtching RateFill-FactorGas-Flow RatioNeedle-Like StructureNon-HomogeneousOpen Circuit VoltageReflectanceReflectionRF-PowerRie TexturingSaw DamagesSDRSiliconSilicon Solar CellsSilicon WafersSulfur HexafluorideSurface MorphologyTexturingWet EtchingWorking Pressures
ISSN
1542-1406
Abstract
Reactive ion etching (RIE) texturing is well-known as an effective method to form the surface structure on a multi-crystalline (mc-Si) wafer that has grains with randomly oriented crystallites. The saw damage removal (SDR) process using HF/HNO 3/D.I (HND) solution was employed in this work, since the etching rate of RIE dry etching was lower than that of wet etching. The surface morphology on mc-Si surface was formed by RIE using a gas flow ratio of SF 6:O 2 = 1:1.22. The control of RF power and working pressure could etch the mc-Si surface of the 15.6 × 15.6 cm 2 area uniformly during RIE texturing process. The surface morphologies textured for 5 and 10 min were needle-like structures and sharp grass-like structures, respectively. Solar cells with the needle-like structure had higher values for open circuit voltage (V oc), short circuit current (I sc), fill factor (FF), and efficiency, despite higher reflectance compared to those with the sharp grass-like structure. The cell textured for 10 min was expected to have non-homogeneous emitter layer as the dark I-V curves of the cells textured for 5 and 10 min were compared. © 2012 Kyungil University.
URI
http://hdl.handle.net/20.500.11750/3415
DOI
10.1080/15421406.2012.693289
Publisher
Taylor and Francis Ltd.
Files:
There are no files associated with this item.
Collection:
ETC1. Journal Articles


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