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Optimization of metal-assisted chemical etching process in fabrication of p-type silicon wire arrays

Title
Optimization of metal-assisted chemical etching process in fabrication of p-type silicon wire arrays
Authors
Choi, HJ[Choi, Ho-Jin]Baek, S[Baek, Seongho]Jang, HS[Jang, Hwan Soo]Kim, SB[Kim, Seong Been]Oh, BY[Oh, Byeong-Yun]Kim, JH[Kim, Jae Hyun]
DGIST Authors
Choi, HJ[Choi, Ho-Jin]; Baek, S[Baek, Seongho]; Jang, HS[Jang, Hwan Soo]; Kim, SB[Kim, Seong Been]; Kim, JH[Kim, Jae Hyun]
Issue Date
2011-01
Citation
Current Applied Physics, 11(1), S25-S29
Type
Article
Article Type
Article; Proceedings Paper
Keywords
AgNO3-BOE SolutionBoe-H2O 2 SolutionCatalystsEtch RatesEtchingEtching ParametersEtching SolutionsEtching TimeFabricationMCEMetal-Assisted Chemical EtchingMetal CatalystOptimizationOptimization ConditionsP-Type SiliconSemiconductor Device ManufactureSemiconductor TechnologySilicon EtchingSilicon WireSilicon WiresThermal EvaporationWell-AlignedWire
ISSN
1567-1739
Abstract
The metal-assisted chemical etching (MCE) has attracted great attention because of the advantages such as simple and large area process, low-cost and compatible with existing semiconductor technology. We have achieved optimization conditions about two kinds of MCE method for fabrication of p-type silicon wire arrays. First one is one-step MCE that used AgNO3 and BOE solution and second is two-step MCE in which silicon etching proceeds by BOE and H 2O2 solution after depositing Au by thermal evaporation. Particularly, the effect of etching parameters, such as etching time and AgNO3 concentration in one-step MCE and metal catalyst thickness and etching solution temperature in two-step MCE on fabrication of silicon was investigated a morphology, length and etch rate of silicon wire. Finally, we have found important factors for fabrication of uniform and well aligned p-type silicon wire by MCE. © 2010 Published by Elsevier B.V. All rights reserved.
URI
http://hdl.handle.net/20.500.11750/3468
DOI
10.1016/j.cap.2010.11.047
Publisher
Elsevier B.V.
Related Researcher
Files:
There are no files associated with this item.
Collection:
Division of Nano∙Energy Convergence Research1. Journal Articles
Center for Core Research Facilities1. Journal Articles


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