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Issue Date Title Author(s) Journal View
2013-11
Atomic layer deposition of ruthenium (Ru) thin films using ethylbenzen-cyclohexadiene Ru(0) as a seed layer for copper metallization

Yeo, Seungmin ;  Choi, Sang-Hyeok ;  Park, Ji-Yoon ;  Kim, Soo-Hyun ;  Cheon, Taehoon ;  Lim, Byoung-Yong ;  Kim, Sunjung

Elsevier BV, 2013-11

 592
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