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Polymer-based semiconductor wafer cleaning: The roles of organic acid, processing solvent, and polymer hydrophobicity
  • Yu, Seong Hoon ; 
  • Jeon, Hayoung ; 
  • Ko, Hyunki ; 
  • Cha, Ji Hoon ; 
  • Jeon, Soyeon ; 
  • Jae, Mingyu ; 
  • Nam, Geon-Hee ; 
  • Kim, Kyoungsuk ; 
  • Gil, Yeongjin ; 
  • Lee, Kuntack ; 
    • et al
  • 2023-08
  • Yu, Seong Hoon. (2023-08). Polymer-based semiconductor wafer cleaning: The roles of organic acid, processing solvent, and polymer hydrophobicity. Chemical Engineering Journal, 470. doi: 10.1016/j.cej.2023.144102
  • Elsevier
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