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Machine Learning Based on Digital Image Colorimetry Driven In Situ, Noncontact Plasma Etch Depth Prediction

Article
Machine Learning Based on Digital Image Colorimetry Driven In Situ, Noncontact Plasma Etch Depth Prediction
  • Kang, Minji ; 
  • Kim, Seongho ; 
  • Go, Eunseo ; 
  • Paek, Donghyeon ; 
  • Lim, Geon ; 
  • Kim, Muyoung ; 
  • Kim, Changmin ; 
  • Kim, Soyeun ; 
  • Jang, Sung Kyu ; 
  • Bak, Moon Soo ; 
    • et al
  • 2026-01
  • Advanced Intelligent Systems, v.8, no.1
  • Wiley
  • View : 227
  • Download : 148
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