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전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

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Article
Structural control in atomic layer deposited hafnium oxide thin films through vertical cavity surface-emitting laser (VCSEL)-Based ultra-rapid heating
  • Kim, Jae-Hwan ; 
  • Kim, Dohyoung ; 
  • Cho, Jeong-Won ; 
  • Hwang, Heesu ; 
  • Noh, Young-Soo ; 
  • Lee, Myeong-Ill ; 
  • Bae, Seung-Muk ; 
  • Cheon, Taehoon ; 
  • Oh, Youkeun ; 
  • Kim, Dokyun ; 
    • et al
  • 2024-11
  • Kim, Jae-Hwan. (2024-11). Structural control in atomic layer deposited hafnium oxide thin films through vertical cavity surface-emitting laser (VCSEL)-Based ultra-rapid heating. Ceramics International, 50(21), 43819–43827. doi: 10.1016/j.ceramint.2024.08.235
  • Elsevier
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