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Article
The effects of decomposition of CpZr(NMe2)3 on atomic layer deposition for high-k ZrO2 thin films
  • Choi, Eunmi ; 
  • Kim, Hayeong ; 
  • Maeng, SeonJeong ; 
  • Lee, Jaebaek ; 
  • Kim, Dae-Hwan ; 
  • Heo, Kyuyoung ; 
  • Yun, Ju-Young
  • 2022-08
  • Choi, Eunmi. (2022-08). The effects of decomposition of CpZr(NMe2)3 on atomic layer deposition for high-k ZrO2 thin films. Materials Today Communications, 32. doi: 10.1016/j.mtcomm.2022.104008
  • Elsevier BV
  • View : 885
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