DGIST Library Repository

Browsing by Titles

All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

Showing results 1 to 1 of 1

Article
The effects of decomposition of CpZr(NMe2)3 on atomic layer deposition for high-k ZrO2 thin films
  • Choi, Eunmi ; 
  • Kim, Hayeong ; 
  • Maeng, SeonJeong ; 
  • Lee, Jaebaek ; 
  • Kim, Dae-Hwan ; 
  • Heo, Kyuyoung ; 
  • Yun, Ju-Young
  • 2022-08
  • Choi, Eunmi. (2022-08). The effects of decomposition of CpZr(NMe2)3 on atomic layer deposition for high-k ZrO2 thin films. Materials Today Communications, 32. doi: 10.1016/j.mtcomm.2022.104008
  • Elsevier BV
  • View : 559
  • Download : 0
1