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Identification of donor deactivation centers in heavily As-doped Si using time-of-flight medium-energy ion scattering spectroscopy
  • Min, Won Ja ; 
  • Park, Kyungsu ; 
  • Yu, Kyu-Sang ; 
  • Joo, Sungjung ; 
  • Kim, Yong-Sung ; 
  • Moon, Dae Won
  • 2015-10-07
  • Min, Won Ja. (2015-10-07). Identification of donor deactivation centers in heavily As-doped Si using time-of-flight medium-energy ion scattering spectroscopy. Journal of Applied Physics, 118(13). doi: 10.1063/1.4932149
  • American Institute of Physics Publishing
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