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  • 2022-10-27
  • 24th International Congress on Acoustics, ICA 2022, pp.1 - 4
  • International Commission for Acoustics (ICA)
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  • Jang, Il Ryu
  • Kim, Hyeong-U
  • Kim, Taehoon
  • Kweun, Minwoo
  • Eom, Geon Woong
  • Park, In Yong
  • Lee, Sangho
  • Kim, Seongho
  • Kang, Minji
  • Park, Kyeong Jun
  • et al
  • 2025-03
  • Jang, Il Ryu. (2025-03). Direct monitoring of generated particles in plasma enhanced chemical vapor deposition process using temperature compensating quartz crystal microbalance. Sensors and Actuators A: Physical, 383. doi: 10.1016/j.sna.2024.116181
  • Elsevier
  • View : 146
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  • Kang, Minji
  • Kim, Seongho
  • Go, Eunseo
  • Paek, Donghyeon
  • Lim, Geon
  • Kim, Muyoung
  • Kim, Changmin
  • Kim, Soyeun
  • Jang, Sung Kyu
  • Bak, Moon Soo
  • et al
  • ACCEPT
  • Advanced Intelligent Systems
  • Wiley
  • View : 33
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